Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror

ABSTRACT

An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a sealed space whose pressure is adjusted such that a characteristic of the mirror falls within a predetermined range.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to: micro optical systemsapplying micro machining techniques; and image forming apparatuses suchas digital copying machines and laser printers, and more particularly,to: an optical scanning apparatus using a beam-supported-type vibrationmirror driven by an electrostatic force; an optical scanning apparatusthat can be applied to, for example, an optical-scanning-type barcodereader and an in-vehicle laser radar; and an image forming apparatususing such an optical scanning apparatus.

2. Description of the Related Art

The optical scanning apparatus using a beam-supported-type vibrationmirror driven by electrostatic force is a promising candidate for anoptical writing apparatus of an image forming apparatus such as adigital copying machine and a laser printer, and for an optical readingapparatus such as a barcode reader and a scanner.

“Silicon Torsional Scanning Mirror”, Kurt E. Petersen, IBM Journal ofResearch and Development Vol. 24, 1980, pages 631-637 discloses abeam-supported-type vibration mirror that causes a mirror substratesupported by two beams provided on the same line to performreciprocating motion by twisting the two beams with electrostatic forceexerted between the mirror substrate and electrodes provided atpositions opposing the mirror substrate, while using the two beams asthe rotation axis. The vibration mirror manufactured by using a micromachining technique has a simple structure compared to an opticalscanning apparatus configured to rotate a polygon mirror by using amotor, and can be integrally formed in a semiconductor process. Thus,the size of the vibration mirror can be easily reduced and manufacturingcosts thereof are low. In addition, since a polygon mirror uses aplurality of mirror surfaces, there is a problem of variation inaccuracy of each of the mirror surfaces. However, the vibration mirrorhaving only a single mirror does not have such a problem. Further, it ispossible for the vibration mirror to easily correspond to high-speedscanning performed by reciprocating scanning.

Various electrostatically-actuated vibration mirrors are known such as:an electrostatically-actuated vibration mirror that decreases therigidity of a beam by forming the beam into an S-shape so as to achievea large swing angle with a small driving force (refer to Japanese PatentPublication No. 2924200, for example); an electrostatic vibration mirrorhaving a beam whose thickness is thinner than those of a mirrorsubstrate and a frame substrate (refer to Japanese Laid-Open PatentApplication No. 7-92409, for example); an electrostatically-actuatedvibration mirror in which driving electrodes are arranged at a positionthat does not overlap with swinging directions of a mirror part (referto Japanese Patent Publication No. 3011144 and “An ElectrostaticallyExcited 2D-Micro-Scanning-Mirror with an In-Plane Configuration of theDriving Electrodes”, Harald Schenk, The 13th Annual InternationalConference on MEMS 2000, pages 473-478, for example); anelectrostatically-actuated vibration mirror that reduces a drivingvoltage without changing a swing angle of a mirror by providing adriving electrode in a slanted manner with respect to the centerposition of the swing of the mirror (refer to “Fabrication, Simulationand Experiment of a Rotating Electrostatic Silicon Mirror with LargeAngular Deflection”, Camon Henri, The 13th Annual InternationalConference on MEMS 2000, pages 645-650, for example); and anelectrostatically-actuated vibration mirror having an electrode foractuation in addition to a driving electrode (refer to JapaneseLaid-Open Patent Application No. 2002-267995).

Conventionally, there is a vibration mirror that causes a mirrorsubstrate to perform reciprocating motion while using as the rotationaxis two beams provided on the same line to support a mirror substrateat two opposing sides thereof by driving the mirror substrate withelectrostatic force exerted between two movable electrodes provided onthe other opposing two sides of the mirror substrate and drivingelectrodes opposing to the movable electrodes. Such a vibration mirroris driven to perform reciprocating motion at a resonance point. However,as can be seen from FIG. 14 showing measurement results, theabove-mentioned vibration mirror has a problem in that the swing angle(vibration amplitude) of the mirror substrate is significantly variedwhen environmental temperature is changed. The problem is caused sincethe resonance point of a vibrating system of a vibration mirror variesdepending on environmental temperature and the variation of theresonance point significantly affects the swing angle of the mirrorsubstrate.

A description is given below of the resonance point of such a vibrationmirror and variation of the resonance point due to change inenvironmental temperature. The resonance point may be approximated bythe following equation (1), where kθ represents a torsional elasticcoefficient of a beam, and I represents a moment of inertia of themirror substrate.f=½π√{square root over ( )}(k/I)  (1)

The torsional elastic coefficient kθ is given by the following equation(2) where c represents the width of the beam, t represents the height ofthe beam, and L represents the length of the beam. It should be notedthat β represents a modulus of section, E represents Young's modulus,and ν represents Poisson's ratio.kθ=β·t·c ³ ·E/L(1+ν)  (2)The Young's modulus E at a temperature tmp is obtained by the followingequation (3), provided that the temperature coefficient is Δht.E=E ₀(1−Δht*tmp)  (3)It should be noted that E₀ is given by the following equation (4).E ₀=1.9e+12 (dyne/cm2), Δht=75e−6/° C.  (4)

From the above equations (1) through (4), it is understood that theYoung's modulus E is decreased in proportion to the increase in thetemperature tmp. Accordingly, it is understood that the resonance pointfalls when the temperature tmp is increased.

In order to reduce variation of the swing angle caused by change inenvironmental temperature, similarly to an optical scanner driven by apiezoelectric element disclosed in, for example, Japanese PatentPublication No. 2981600, it is possible to apply a mechanism in which anelectric resistive element serving as a heater element is provided, andvariation of Young's modulus is suppressed by increasing or decreasingthe heat value of the electric resistive element. However, it isundesirable in terms of reliability to provide an electric resistiveelement in a beam that is elastically deformed. Additionally, when theelectric resistive element is provided, the manufacturing process of avibration mirror is complicated, and additional means are required forcontrolling a current of the electric resistive element, which areproblems in terms of costs.

Conventional optical scanning apparatuses use a polygon mirror or aGalvano mirror as a deflector that scans an optical beam. In order toachieve a higher resolution image and high-speed printing, it isnecessary to further increase the moving speed of the mirror, which maypresent problems in durability of a bearing supporting the mirror, heatgeneration due to windage loss of the mirror, and noise, for example.Thus, there is a limit for such conventional optical scanningapparatuses to perform high-speed scanning.

On the other hand, recently, studies have been made on opticaldeflectors using micro machining techniques, and methods have beenproposed that integrally form a vibration mirror and a beam supportingthe vibration mirror from a Si substrate (refer to Japanese PatentPublications No. 2924200 and No. 3011144, for example). According to theproposed techniques, since reciprocating vibration is performed by usingresonance, there is an advantage in that noise is low despite that ahigh-speed operation is performed. Additionally, it is possible toreduce power consumption since a driving force for rotating thevibration mirror is small.

By using a vibration mirror as mentioned above, compared to theconventional methods that use a polygon mirror, it is possible toprovide an optical scanning apparatus having a reduced size andconsuming less power. However, the swing angle of the vibration mirroris small, and there is a limit to the size of a reflection surface.Hence, a method has been proposed in which a plurality of opticalscanning apparatuses having short optical path lengths are arranged inparallel, thereby diving an image to be constituted in the main scanningdirection, reducing respective recording lengths, and splicing themtogether (refer to Japanese Laid-Open Patent Application No.2001-228428).

However, when using a plurality of vibration mirrors and scanning in adivided manner as mentioned above, variation in the resonance frequencyof each of the vibration mirrors may become a major problem. This isbecause when the variation in the resonance frequency is large, it isdifficult or impossible to drive the plurality of vibration mirrors witha common driving frequency. It should be noted that the span ofadjustable range of the swing angle of a mirror is extremely small.

Variation in a resonance frequency may be caused by the followingfactors.

(i) variation in processing during production

(ii) variation due to change in environmental temperature and/orhumidity

(iii) variation in ambient pressure (when used in the atmosphere)

Accordingly, the above-mentioned problem cannot be avoided, and it isnecessary to select one of the following options: for example, drivingthe vibration mirrors with respective driving frequencies correspondingto respective resonance frequencies; selecting and using those vibrationmirrors that fall within a predetermined range, and driving thevibration mirrors with the same driving frequency, which is undesirablein terms of process yield; and adding a complicated driving systemwhereby controlling and driving the vibration mirrors.

Countermeasures for variation in a resonance frequency due to variationin processing (the above item (i)) include a method that, in amanufacturing process of a vibration mirror, after the vibration mirrorand a torsion beam are formed, performs etching or depositing on thevibration mirror and/or the torsion beam so as to vary the mass thereof(generally referred to as “trimming”) while driving the vibrationmirror, thereby adjusting the resonance frequency to fall within apredetermined range (refer to Japanese Laid-Open Patent Applications No.2002-40353, No. 2002-40355, No. 2002-228965).

However, since the above-mentioned method performs the adjustment in themiddle of the manufacturing process, there are problems in that a shifttends to occur if adjustment is not performed in prospect of adifference between the resonance frequencies before and after completionof the vibration mirror, and it is difficult or impossible to correspondto variation in the resonance frequency under an environment subjectedto the above items (ii) and/or (iii).

In addition, the resonance frequency of a vibration mirror isfundamentally determined to a unique value by the rigidity of an elasticmember (torsion beam) and the inertia of the vibration mirror. Hence,countermeasures for variation in the resonance frequency due totemperature change under an environment subjected to the above item (ii)include a method that provides a heater (resistance heating) to atorsion beam, which is an elastic member, and maintains the temperatureof the elastic member at a constant value, thereby suppressing rigidityvariation due to change in environmental temperature, i.e., frequencyvariation (refer to Japanese Laid-Open Patent Application No. 9-197334,for example).

However, there are problems in the above-mentioned method. For example,since the above-mentioned method provides the heater, it is inevitableto avoid an increase in the manufacturing costs for the heater. Inaddition, since electricity is continuously conducted to the heater,power consumption also is increased. Further, since the temperature ofthe elastic member is controlled by heat generation of the heater, thereis a problem in that it is difficult or impossible to correspond todecrease in environmental temperature in a positive manner.

Additionally, the countermeasures also include a method in which avibration mirror is bonded and fixed to a base member having a thermalexpansion coefficient different from that of the vibration mirror, andrigidity variation in an elastic member is canceled out by using astress created due to the difference between the thermal expansioncoefficients of the vibration mirror and the base member, whichdifference is generated due to temperature change, thereby suppressingfrequency variation (refer to Japanese Laid-Open Patent Application No.2002-321195, for example).

However, with the above-mentioned method, the stress is generated invarious ways depending on the structure, materials, and bonding methods.Hence, it is doubtful whether it is possible to design a vibrationmirror such that the above-mentioned stress is effectively generated,and whether the stress is effectively generated as designed, whenconsidering errors inevitably introduced during the production of thevibration mirror.

Generally, a structure is used in which the vibration space of avibration mirror is sealed with respect to variation in a resonancefrequency in the case where the above item (iii) exists.

Further, countermeasures for the above items (i) through (iii) include amethod that uses a driving circuit constituted by a feedback circuithaving a relatively simple structure, thereby positively driving avibration mirror at a resonance frequency (refer to Japanese Laid-OpenPatent Application No. 2002-277809, for example). However, the methoddrives the vibration mirror with an electromagnetic force. In themethod, a coil formed on the vibration mirror for conducting a drivingcurrent is commonly used, and feedback is given by detecting a counterelectromotive force. Thus, there is, for example, a limitation that themethod is inapplicable to a vibration mirror that uses a driving forceother than an electromagnetic force.

SUMMARY OF THE INVENTION

A general object of the present invention is to provide an improved anduseful optical scanning apparatus, optical writing apparatus, imageforming apparatus, and method in which one or more of theabove-mentioned problems are eliminated.

Another and more specific object of the present invention is to providean optical scanning apparatus using an electrostatically-actuatedbeam-supported-type vibration mirror, an optical writing apparatus andan image forming apparatus using the optical scanning apparatus that caneffectively suppress variation of a swing angle of a vibration mirrorcaused by, for example, change in environmental temperature, withoutchanging the structure of a vibration mirror and without providingadditional means that increase costs, thereby achieving stable opticalscanning and stable image formation.

Still another object of the present invention is to provide a methodthat reduces variation in the resonance frequency of a vibration mirrorand a method that increases the tolerance range for variation in adriving frequency.

In order to achieve the above-mentioned objects, according to one aspectof the present invention, there is provided an optical scanningapparatus including:

a vibration mirror including driving electrodes; and

a driving part that applies a driving pulse to the driving electrodes ofthe vibration mirror,

the vibration mirror including:

-   -   a mirror substrate having free ends;    -   two beams swingably supporting the mirror substrate; and    -   movable electrodes formed on the free ends of the mirror        substrate; and    -   wherein the driving electrodes are provided at positions        corresponding to the movable electrodes so as to generate an        electrostatic torque for vibrating the mirror substrate, and

wherein a cycle of the driving pulse is set such that the mirrorsubstrate is vibrated at a frequency that is higher than a resonancepoint of a resonance frequency band of the vibration mirror.

Additionally, according to another aspect of the present invention,there is provided an optical scanning apparatus including:

a vibration mirror; and

a driving part,

the vibration mirror including:

-   -   a mirror substrate having free ends;    -   two beams swingably supporting the mirror substrate;    -   movable electrodes formed on the free ends of the mirror        substrate;    -   two first driving electrodes that generate an electrostatic        torque for vibrating the mirror substrate; and    -   two second driving electrodes that are provided to overlap with        the respective first driving electrodes in a vibration direction        of the mirror substrate and that generate an electrostatic        torque for vibrating the mirror substrate,

the driving part being adapted to apply a first driving pulse to thefirst driving electrodes, a second driving pulse to one of the seconddriving electrodes, and a third driving pulse to the other of the seconddriving electrodes,

wherein cycles and phases of the first, second and third driving pulsesare set such that the mirror substrate is vibrated at a frequency thatis higher than a resonance point of a resonance frequency zone of thevibration mirror.

Additionally, according to another aspect of the present invention,there is provided a method of driving a vibration mirror including: amirror substrate having free ends; two beams swingably supporting thebeams; movable electrodes formed on the free ends of the mirrorsubstrate; and driving electrodes that are provided at positionscorresponding to the movable electrodes and that generate anelectrostatic torque for vibrating the mirror substrate, the methodincluding the steps of:

setting a cycle of a driving pulse such that the mirror substrate isvibrated at a frequency higher than a resonance point of a resonancefrequency band; and

applying the driving pulse to the driving electrodes.

Additionally, according to another aspect of the present invention,there is provided a method of driving a vibration mirror including: amirror substrate; two beams swingably supporting the mirror substrate;movable electrodes formed on free ends of the mirror substrate; twofirst driving electrodes that generate electrostatic torque forvibrating the mirror substrate; and two second driving electrodes thatare provided to overlap with the respective first driving electrodes ina vibration direction of the mirror substrate and that generate anelectrostatic torque for vibrating the mirror substrate, the methodincluding the steps of:

setting cycles and phases of a first driving pulse, a second drivingpulse, and a third driving pulse such that the mirror substrate isvibrated at a frequency that higher than a resonance point of aresonance frequency band of the mirror substrate; and

applying the first driving pulse to the first driving electrodes, thesecond driving pulse to one of the second driving electrodes, and thethird driving pulse to the other of the second electrodes.

According to the present invention, variation in the swing angle of thevibration mirror due to environmental temperature change is reduced.Thus, it is possible to perform stable optical scanning.

In an embodiment of the present invention, by driving the mirrorsubstrate by means of the first and second driving electrodes, it ispossible to increase the swing angle of the vibration mirror and expandthe scanning width.

In an embodiment of the present invention, it is possible to effectivelydrive the mirror substrate by exerting only an electrostatic torque thatincreases the speed of vibration of the mirror substrate. Also, it ispossible to obtain a greater swing angle by using both electrostaticattraction and electrostatic repulsive force of the second drivingelectrodes.

In an embodiment of the present invention, it is possible to adjust theswing angle of the vibration mirror.

In an embodiment of the present invention, the facing areas between thedriving electrodes and the movable electrodes may be increased. Hence,it is possible to obtain a desired swing angle with a low drivingvoltage.

In an embodiment of the present invention, it is possible to reduce theload at the time when the mirror substrate is vibrated. Hence, it ispossible to obtain a desired swing angle with a low driving voltage.

Additionally, according to another aspect of the present invention,there is provided an optical writing apparatus for scanning an imagecarrier with an optical light beam modulated with a recording signal,the optical writing apparatus including:

an optical scanning apparatus; and

an incident part,

the optical scanning apparatus including:

-   -   a vibration mirror including driving electrodes; and    -   a driving part that applies a driving pulse to the driving        electrodes of the vibration mirror,    -   the vibration mirror including:        -   a mirror substrate having a mirror surface and free ends;        -   two beams swingably supporting the mirror substrate; and        -   movable electrodes formed on the free ends of the mirror            substrate;

wherein the driving electrodes are provided at positions correspondingto the movable electrodes so as to generate an electrostatic torque forvibrating the mirror substrate, and

wherein a cycle of the driving pulse is set such that the mirrorsubstrate is vibrated at a frequency that is in a resonance frequencyband of the vibration mirror and is higher than a resonance point, and

the incident part being disposed to cause the optical light beammodulated with the recording signal to be incident on the mirror surfaceof the mirror substrate of the vibration mirror of the optical scanningapparatus.

Additionally, according to another aspect of the present invention,there is provided an image forming apparatus including:

an image carrier;

an optical writing apparatus that forms an electrostatic latent image onthe image carrier by scanning the image carrier with an optical lightbeam modulated with a recording signal;

a developing part that develops with toner the electrostatic latentimage formed on the image carrier;

a transfer part that transfers a developed toner image on a transfermedium; and

a fixing part that fixes a transferred toner image to the transfermedium,

the optical writing apparatus including:

an optical scanning apparatus; and

an incident part,

the optical scanning apparatus including:

-   -   a vibration mirror including driving electrodes; and    -   a driving part that applies a driving pulse to the driving        electrodes of the vibration mirror,    -   the vibration mirror including:        -   a mirror substrate having a mirror surface and fee ends;        -   two beams swingably supporting the mirror substrate; and            -   movable electrodes formed on the free ends of the mirror                substrate;    -   wherein the driving electrodes are provided at positions        corresponding to the movable electrodes so as to generate an        electrostatic torque for vibrating the mirror substrate, and    -   wherein a cycle of the driving pulse is set such that the mirror        substrate is vibrated at a frequency that is higher than a        resonance point of a resonance frequency band of the vibration        mirror, and

the incident part being disposed to cause the optical light beammodulated with the recording signal to be incident on the mirror surfaceof the mirror substrate of the vibration mirror of the optical scanningapparatus.

Additionally, according to another aspect of the present invention,there is provided an optical writing apparatus for scanning an imagecarrier with an optical light beam modulated with a recording signal,the optical writing apparatus including:

an optical scanning apparatus; and

an incident part,

the optical apparatus including:

-   -   a vibration mirror; and    -   a driving part,    -   the vibration mirror including:        -   a mirror substrate having free ends and a mirror surface;        -   two beams swingably supporting the mirror substrate;        -   movable electrodes formed on the free ends of the mirror            substrate;        -   two first driving electrodes that generate an electrostatic            torque for vibrating the mirror substrate; and        -   two second driving electrodes that are provided to overlap            with the respective first driving electrodes in a vibration            direction of the mirror substrate and that generate an            electrostatic torque for vibrating the mirror substrate,    -   the driving part being adapted to apply a first driving pulse to        the first driving electrodes, a second driving pulse to one of        the second driving electrodes, and a third driving pulse to the        other of the second driving electrodes,

wherein cycles and phases of the first, second and third driving pulsesare set such that the mirror substrate is vibrated at a frequency thatis higher than a resonance point of a resonance frequency zone of thevibration mirror, and

the incident part causing the optical light beam modulated with therecording signal to be incident on a mirror surface of the mirrorsubstrate of the vibration mirror of the optical scanning apparatus.

Additionally, according to another aspect of the present invention,there is provided an image forming apparatus including:

an image carrier;

an optical writing apparatus that forms an electrostatic latent image onthe image carrier by scanning the image carrier with an optical lightbeam modulated with a recording signal;

a developing part that develops with toner the electrostatic latentimage formed on the image carrier;

a transfer part that transfers a developed toner image on a transfermedium; and

a fixing part that fixes a transferred toner image to the transfermedium,

the optical writing apparatus including:

an optical scanning apparatus; and

an incident part,

the optical apparatus including:

-   -   a vibration mirror; and    -   a driving part,    -   the vibration mirror including:        -   a mirror substrate having free ends and a mirror surface;        -   two beams swingably supporting the mirror substrate;        -   movable electrodes formed on the free ends of the mirror            substrate;        -   two first driving electrodes that generate an electrostatic            torque for vibrating the mirror substrate; and        -   two second driving electrodes that are provided to overlap            with the respective first driving electrodes in a vibration            direction of the mirror substrate and that generate an            electrostatic torque for vibrating the mirror substrate,    -   the driving part being adapted to apply a first driving pulse to        the first driving electrodes, a second driving pulse to one of        the second driving electrodes, and a third driving pulse to the        other of the second driving electrodes,

wherein cycles and phases of the first, second and third driving pulsesare set such that the mirror substrate is vibrated at a frequency thatis higher than a resonance point of a resonance frequency zone of thevibration mirror, and

the incident part being adapted to cause the optical light beammodulated with the recording signal to be incident on the mirror surfaceof the mirror substrate of the vibration mirror of the optical scanningapparatus.

Accordingly, it is possible to realize an inexpensive and compactoptical writing apparatus that can perform stable optical writing, andan inexpensive and compact image forming apparatus that can performstable image formation.

In addition, it is possible to reduce power consumption and noise of anoptical writing apparatus and an image forming apparatus.

Additionally, according to another aspect of the present invention,there is provided an optical scanning apparatus including;

a vibration mirror having a mirror surface that reflects an optical beamand vibrated in a vibration space formed in the optical scanningapparatus; and

a pair of torsion beams swingably supporting the vibration mirror in thevibration space,

wherein the vibration space is sealed and an air pressure therein isadjusted such that a characteristic of the vibration mirror falls withina predetermined range.

According to an aspect of the present invention, the vibration space maybe sealed after adjusting the air pressure therein. Hence, it ispossible to adjust characteristics (e.g., resonance frequency and swingangle) of a vibration mirror that can be varied by adjusting the airpressure. Hence, it is possible to obtain a vibration mirror havingdesired characteristics by performing the above-mentioned adjustment inthe last manufacturing process of the vibration mirror.

Additionally, according to another aspect of the present invention,there is provided an optical scanning apparatus including;

a vibration mirror having a mirror surface that reflects an opticalbeam;

a pair of torsion beams swingably supporting the vibration mirror in asealed vibration space formed in the optical scanning apparatus; and

an air pressure adjusting part that adjusts an air pressure in thevibration space such that a characteristic of the vibration mirror fallswithin a predetermined range.

According to an aspect of the present invention, the air pressure in thevibration space may be adjusted after sealing the vibration mirror.Hence, it is possible to make variation in characteristics of opticalscanning apparatuses fall within a predetermined range. Thus, it ispossible to easily adjust such variation.

Additionally, according to another aspect of the present invention,there is provided an optical scanning apparatus including;

a vibration mirror having a mirror surface that reflects an optical beamand vibrated in a sealed vibration space formed in the optical scanningapparatus;

a pair of torsion beams swingably supporting the vibration mirror in thesealed vibration space; and

an air pressure adjusting part that adjusts an air pressure in thesealed vibration space such that a predetermined swing angle is obtainedat a predetermined driving frequency or a predetermined band.

In an embodiment of the present invention, it is possible to obtaindesired swing angles in a plurality of optical scanning apparatuseshaving variation in their characteristics with an arbitrarily-determinedconstant driving frequency.

In an embodiment of the present invention, the air pressure adjustingpart may absorb a gas in the vibration space, and adjust the airpressure in the vibration space by absorbing the gas therein.

In an embodiment of the present invention, it is possible to reducevariation in characteristics of vibration mirrors by adjusting the airpressures in the vibration spaces.

In an embodiment of the present invention, the air pressure adjustingpart may release a gas in the vibration space and adjust the airpressure in the vibration space by releasing the gas therein.

In an embodiment of the present invention, it is possible to reducevariations in characteristics of vibration mirrors.

In an embodiment of the present invention, a gas introduced into thevibration space may be formed by mixing a plurality of kinds of gases.

In an embodiment of the present invention, it is possible to finelyadjust the air pressures in the vibration spaces in which the vibratingmirrors are vibrated. Hence, it is possible to reduce variation incharacteristics of vibrating mirrors.

In an embodiment of the present invention, the air pressure adjustingpart may include a plurality of kinds of air pressure adjusting parts.

In an embodiment of the present invention, the adjustable range of airpressure in the vibration space may be increased, and it is possible toperform fine adjustment of the air pressure therein. Thus, highflexibility in adjustment is achieved.

In an embodiment of the present invention, the air pressure adjustingparts may have different activation temperatures.

In an embodiment of the present invention, it is possible to coarselyand finely adjust the air pressure in the vibration space merely byvarying temperature. Hence, it is possible to further reduce variationin characteristics of vibration mirrors.

In an embodiment of the present invention, the air pressure adjustingparts may have different activators.

In an embodiment of the present invention, it is possible to performlocal activation, and coarsely and finely adjust the air pressure in thevibration space. Thus, it is possible to further reduce variation incharacteristics of vibration mirrors.

In an embodiment of the present invention, a plurality of the airpressure adjusting parts may be arranged at different positions.

In an embodiment of the present invention, reaction more than scheduledis prevented in activation by heating. Thus, it is possible to easilyadjust the air pressure.

In an embodiment of the present invention, an optical scanning apparatusmay include:

a driving voltage generator applying a voltage of a predeterminedfrequency to the optical scanning apparatus,

wherein the vibration mirror is driven in a band that is in the vicinityof a resonance frequency and is outside a resonance peak.

In an embodiment of the present invention, by using a band outside aresonance peak, it is possible to increase the adjustable range of thedriving frequency.

Additionally, according to another aspect of the present invention,there is provided an image forming apparatus including:

an optical scanning apparatus as described herein for example;

a photo conductor on which an electrostatic image is formed by theoptical scanning apparatus;

a developing part developing the electrostatic image by a toner; and

a transfer part transferring a developed toner image onto a sheetmedium.

In accordance with the present invention, compared to conventionalscanning means using a polygon mirror, power consumption is less. Thus,it is possible to provide an image forming apparatus producing lownoise.

Other objects, features and advantages of the present invention willbecome more apparent from the following detailed description when readin conjunction with the following drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic plan view of a vibration mirror used in anoptical scanning apparatus according to a first embodiment of thepresent invention;

FIG. 1B is a schematic cross-sectional view of the vibration mirror usedin the optical scanning apparatus according to the first embodiment ofthe present invention;

FIG. 2 is a schematic diagram showing a general structure of the opticalscanning apparatus according to the first embodiment of the presentinvention;

FIG. 3 is a waveform chart for explaining a driving method of thevibration mirror of the optical scanning apparatus according to thefirst embodiment of the present invention;

FIG. 4A is a schematic diagram for explaining a relationship between theelectrostatic torque and swing angle of the vibration mirror of theoptical scanning apparatus according to the first embodiment of thepresent invention;

FIG. 4B is a graph for explaining a relationship between theelectrostatic torque and swing angle of the vibration mirror of theoptical scanning apparatus according to the first embodiment of thepresent invention;

FIG. 5 is a graph showing a relationship between the vibration frequencyand the swing angle;

FIG. 6A is a schematic plan view of a vibration mirror seen from theside opposite to a mirror surface;

FIG. 6B is a schematic cross-sectional view of the vibration mirrortaken along the line A-A′ in FIG. 6A;

FIG. 6C is a schematic plan view of the vibration mirror seen from themirror surface side;

FIG. 7 is a schematic diagram showing a general structure of the opticalscanning apparatus according to the second embodiment of the presentinvention;

FIG. 8 is a waveform chart for explaining a driving method of thevibration mirror in the second embodiment of the present invention;

FIG. 9A is a schematic diagram for explaining a relationship between theelectrostatic torque and swing angle of the vibration mirror of theoptical scanning apparatus according to the second embodiment of thepresent invention;

FIG. 9B is a graph for explaining a relationship between theelectrostatic torque and swing angle of the vibration mirror of theoptical scanning apparatus according to the second embodiment of thepresent invention;

FIG. 10 is a waveform chart for explaining a driving method of thevibration mirror of the optical scanning apparatus according to a thirdembodiment of the present invention;

FIG. 11A is a waveform chart for explaining a driving method of avibration mirror in a fifth embodiment of the present invention;

FIG. 11B is another waveform chart for explaining the driving method ofthe vibration mirror in the fifth embodiment of the present invention;

FIG. 12 is a schematic diagram of an image forming apparatus accordingto a sixth embodiment of the present invention;

FIG. 13 is a schematic diagram of an optical writing apparatus accordingto the sixth embodiment of the present invention;

FIG. 14 is a graph showing a relationship between the swing angle of thevibration mirror and environmental temperature;

FIG. 15 is a plan view of an optical scanning apparatus;

FIG. 16 is a cross-sectional view of the optical scanning apparatustaken along the line A-A′ in FIG. 15;

FIG. 17 is a cross-sectional view of another optical scanning apparatus;

FIG. 18 is a graph showing characteristics of the swing angle of avibration mirror with respect to the driving frequency;

FIG. 19 is a graph illustrating variation in frequency characteristicsof the vibration mirror when a sealing air pressure is changed;

FIG. 20 is a graph showing a relationship between the swing angle of thevibration mirror and the sealed air pressure;

FIG. 21 is a plan view of an optical scanning apparatus;

FIG. 22 is a cross-sectional view of the optical scanning apparatustaken along the line A-A′ in FIG. 21;

FIG. 23 is a cross-sectional view of another optical scanning apparatus;

FIG. 24 is a plan view of an optical scanning apparatus;

FIG. 25 is a cross-sectional view of the optical scanning apparatustaken along the line A-A′ in FIG. 24;

FIG. 26 is a graph showing difference in the resonance frequencies ofvibration mirrors;

FIG. 27 is a graph showing a relationship between driving voltage andswing angle of a vibration mirror;

FIG. 28 is a cross-sectional view of an optical scanning apparatus;

FIG. 29 is a table showing chemical absorption characteristics of metalswith respect to a plurality of kinds of gases;

FIG. 30 is an exploded perspective view of an optical scanningapparatus;

FIG. 31 is a plan view of a first substrate;

FIG. 32 is a plan view of a second substrate;

FIG. 33 is a graph showing a relationship between the swing angle of avibration mirror and electrostatic torque of each fixed electrode;

FIG. 34 is a partial cross-sectional view of an electrode portion;

FIG. 35 is a cross-sectional view of optical scanning means taken alonga sub-scanning direction;

FIG. 36 is an exploded perspective view of the optical scanning means;

FIG. 37 is an exploded perspective view for explaining an arrangement ofoptical elements in the optical scanning means; and

FIG. 38 is a schematic diagram showing the structure of a color laserprinter, which is an image forming apparatus.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

A description is given below of preferred embodiments of the presentinvention, with reference to the drawings.

First Embodiment

A description is given below of the first embodiment of the presentinvention. FIGS. 1A and 1B show the structure of a vibration mirror 100Aused in an optical scanning apparatus 200A according to this embodiment.FIG. 2 shows the general structure of the optical scanning apparatus200A.

FIG. 1A is a schematic plan view of the vibration mirror 100A seen fromthe side opposite to a mirror surface of the vibration mirror 100A. FIG.1B is a schematic cross sectional view of the vibration mirror 100Ataken along the line A-A′ in FIG. 1A.

The vibration mirror 100A shown in FIG. 1A includes a mirror substrate101, torsion beams 102 and 103, and a frame supporting part 104. Themirror substrate 101 is supported by the frame supporting part 104 viathe torsion beams 102 and 103 at the central portions of two opposingends thereof. The mirror substrate 101 can perform reciprocatingvibration while using the torsion beams 102 and 103 as the torsionrotation axes. Comb-like movable electrodes 105 and 106 are formed onthe two opposing ends (free ends) of the mirror substrate 101 that arenot supported by the torsion beams 102 and 103. First comb-like drivingelectrodes (driving electrodes) 107 and 108, which engage with thecomb-like movable electrodes 105 and 106 via minute gaps (in anon-contact manner) as shown, are formed in the frame supporting part104. The movable electrodes 105 and 106 and the driving electrodes 107and 108 have the comb-like shapes so that facing areas between themovable electrodes 105 and 106 and the driving electrodes 107 and 108are increased, and a large swing angle is achieved with a low drivingvoltage.

The structure including: the mirror substrate 101; the torsion beams 102and 103; and the frame supporting part 104 having the driving electrodes107 and 108 is integrally formed by conducting a general etching processon a first substrate (a monocrystal silicon substrate having a lowresistance, for example). A mirror surface 109 (FIG. 1B), which isformed by a metal film having a high reflection coefficient with respectto the wavelength of a scanning light that is used, is formed on onesurface of the mirror substrate 101.

A frame supporting part 111 (FIG. 1B) having a shape substantially thesame as that of the frame supporting part 104 is bonded to the framesupporting part 104 via an insulating film 110. The frame supportingpart 111 is manufactured by conducting a general etching process on asecond substrate (monocrystal silicon substrate having a low resistance,for example) bonded to the first substrate via the insulating film 110.

The frame supporting part 104 is divided in an insulating manner byslits 120, 121 and 122 into: a region that is electrically conductive tothe mirror substrate 101; and a region that is electrically conductiveto the driving electrodes 107 and 108. Electrode pads 123 and 124, eachbeing formed by a thin metal layer, are formed in the above-mentionedregions.

According to this embodiment, as shown in FIG. 2, a vibration space ofthe mirror substrate 101 is sealed in a depressurized state by bonding acover substrate 201 and a base substrate 202 to both surfaces of thevibration mirror 10A. By causing the vibration space to assume adepressurized state as mentioned above, the viscous resistance of thevibration space is decreased. Hence, it becomes possible to increase theswing angle of the mirror substrate 101. It should be noted that, thoughthe resonance point of the vibration mirror 100A is approximated by theaforementioned equation (1), the resonance point falls in proportion tothe increase in the vibration space. Since in this embodiment the coversubstrate 201 transmits a scanning light beam, the cover substrate 201is made of, for example, Pyrex glass. The base substrate 202 is made ofan insulating material such as glass and a synthetic resin.

The optical scanning apparatus 200A shown in FIG. 2 includes a drivingcircuit 210 for driving the driving electrodes 107 and 108 of thevibration mirror 10A. The electrode pad 124 (FIG. 1A) of the drivingelectrodes 107 and 108 of the vibration mirror 100A is electricallyconnected to the driving circuit 210 via a penetrating electrode 203formed in the base substrate 202. The electrode pad 123 (FIG. 1A) of themirror substrate 101 is grounded via another penetrating electrode 203of the base substrate 202.

The driving circuit 210 drives the mirror substrate 101 to vibrate in areciprocating manner by applying a common driving pulse to the drivingelectrodes 107 and 108. FIG. 3 shows the phase relationship between thevibration waveform of the mirror substrate 101 (represented by (A)), andthe driving pulse (represented by (B)). The cycle of the driving pulseis set such that the vibration mirror 100A is vibrated at a frequencysomewhat higher than the resonance point of the resonance frequency bandof the vibration mirror 100A.

In FIG. 5, the continuous line represents the relationship between thevibration frequency and the swing angle of the vibration mirror 100A inthis embodiment. In this embodiment, the driving electrodes 107 and 108are driven by the driving pulse having a cycle that vibrates the mirrorsubstrate 101 in a reciprocating manner at a frequency somewhat higherthan the resonance point shown in FIG. 5, i.e., F1. By driving themirror substrate 101 to be vibrated at such a frequency, even if theresonance point of the vibration mirror 100A is varied due to, forexample, change in environmental temperature, variation in the swingangle becomes small.

Referring to FIG. 5, a further description is given below of thevariation in the resonance point of the vibration mirror 100A and thatin the swing angle.

FIG. 4A is a schematic diagram and FIG. 4B is a graph for explaining therelationship between the swing angle and the electrostatic torqueexerted on the mirror substrate 101 of the vibration mirror 100A. θorepresents the angle of the mirror substrate 101 at the time when theedges of the movable electrodes 105 and 106 face the edges of thedriving electrodes 107 and 108. As can be seen from FIG. 4B, when theangle of the mirror substrate 101 is equal to or more than θo, the rateof change of the electrostatic torque with respect to the angle becomeslow. In a case where the vibration mirror 100A is driven at a frequencyout of the resonance point, the timing at which the electrostatic torqueis exerted on the mirror substrate 101 is in the vicinity of θo. Thevariation in the electrostatic torque caused by change in the angle issmall in the vicinity of θo. Accordingly, when the vibration mirror 100Ais driven at a vibration frequency that is somewhat higher than theresonance point, even if the resonance point is varied due to, forexample, change in environmental temperature, the variation in the swingangle of the vibration mirror 100A is small.

Second Embodiment

A description is given below of a second embodiment of the presentinvention. FIGS. 6A, 6B and 6C show the structure of a vibration mirror100B used in an optical scanning apparatus 200B according to thisembodiment. FIG. 7 shows a general structure of the optical scanningapparatus 200B.

FIG. 6-(A) is a schematic plan view of the vibration mirror 100B seenfrom the side opposite to the mirror surface 109. FIG. 6-(B) is aschematic cross-sectional view of the vibration mirror 100B taken alongthe line A-A′ in FIG. 6-(A). FIG. 6-(C) is a schematic plan view of thevibration mirror 100B seen from the mirror surface 109 side.

In FIG. 6, those parts that are the same as those corresponding parts inFIG. 1 are designated by the same reference numerals. The vibrationmirror 100B of the second embodiment structurally differs from thevibration mirror 100A of the first embodiment in that: second comb-likedriving electrodes (driving electrodes) 112 and 113, which overlap withthe first comb-like driving electrodes 107 and 108, are formed in theinner ends of the frame supporting part 111; the frame supporting part111 is divided in an insulating manner by slits 126, 127, 128 and 129into a region that is electrically connected to the driving electrode112 and a region that is electrically connected to the driving electrode113; and electrode pads 130 and 131, each being formed by a thin metalfilm, are formed in the above-mentioned regions.

In this embodiment, as shown in FIG. 7, in the vibration mirror 100Bhaving the two-stage electrode structure as mentioned above, thevibration space of the mirror substrate 101 is sealed in a depressurizedstate by bonding a cover substrate 220 and a base substrate 221 to bothsurfaces of the vibration mirror 100B. By causing the vibration space toassume the depressurized state as mentioned above, the viscousresistance of the vibration space is decreased. Hence, the load on themirror substrate 101 at the time of vibration is reduced, and the swingangle is increased. Since the cover substrate 220 transmits a scanninglight beam, the cover substrate 220 is made of, for example, Pyrexglass. The base substrate 221 is made of an insulating material such asglass and a synthetic resin.

The optical scanning apparatus 200B shown in FIG. 7 includes a drivingcircuit 230 for driving the driving electrodes 107, 108, 112 and 113 ofthe vibration mirror 100B. The common electrode pad 124 (see FIG. 6-(A))of the driving electrodes 107 and 108 of the vibration mirror 100B iselectrically connected to the driving circuit 230 via a penetratingelectrode 222 that is formed in the base substrate 221. The electrodepads 130 and 131 (see FIG. 6-(C)) of the driving electrodes 112 and 113are electrically connected to the driving circuit 230 via penetratingelectrodes 222 that are formed in the cover substrate 220. The electrodepad 123 of the mirror substrate 101 is grounded via a penetratingelectrode of the base substrate 221.

According to the second embodiment of the present invention, therelationship between the driving pulse applied by the driving circuit230 to each of the driving electrodes 107, 108, 112 and 113 and thevibration waveform of the mirror substrate 101 becomes as shown in FIG.8. In FIG. 8, (A) represents the vibration waveform of the mirrorsubstrate 101, (B) represents the waveform of the driving pulse appliedto the driving electrodes 107 and 108, (C) represents the waveform ofthe driving pulse applied to the driving electrode 112, and (D)represents the waveform of the driving pulse applied to the drivingelectrode 113. The cycle and phase of each of the driving pulses is setsuch that the vibration mirror 100B is vibrated at a frequency somewhathigher than the resonance point in the resonance frequency band.

The broken line in FIG. 4 represents the relationship between thevibration frequency and the swing angle of the vibration mirror 100B ofthis embodiment. Since the vibration mirror 100B has a two-stageelectrode structure, compared to the vibration mirror 100A having asingle-stage electrode structure of the first embodiment, the swingangle is increased in the mass. In this embodiment, the vibration mirror100B is driven so that the mirror substrate 101 is vibrated in areciprocating manner at, for example, a frequency in the middle of afrequency zone A whose frequencies are somewhat higher than theresonance point (the peak of the resonance frequency zone) shown in FIG.4. When the vibration mirror 100B is driven to be vibrated at such afrequency, even if the resonance point is varied due to, for example,change in environmental temperature, the variation in the swing anglebecomes small.

A more detailed description is given below of the phase relationshipbetween the vibration and driving pulse of the mirror substrate 101 inthe second embodiment.

FIG. 9A is a schematic diagram and FIG. 9B is a graph for explaining therelationship between the swing angle of the mirror substrate 101 and theelectrostatic torque exerted on the mirror substrate 101 by each of thedriving electrodes 107, 108, 112 and 113. In FIG. 9B, Trq1 representsthe electrostatic torque exerted on the mirror substrate 101 by thedriving electrodes 107 and 108, and Trq2 represents the electrostatictorque exerted on the mirror substrate 101 by the driving electrode 113(112). The electrostatic torque is calculated under the condition inwhich a voltage is applied to the driving electrodes 107 and 108 whenthe swing angle is equal to or less than θo, and a voltage is applied tothe driving electrode 113 when the swing angle is more than θo.

In FIG. 9B, θo represents the angle of the mirror substrate 101 at thetime when the edges of the movable electrodes 105 and 106 face the edgesof the driving electrodes 107 and 108 (refer to FIGS. 4A and 4B). θ1represents the angle of the mirror substrate 101 at the time when acenter 34 of the movable electrode 106 in the thickness directionthereof faces a center 35 of the driving electrode 113 in the thicknessdirection thereof. θ2 represents the angle of the mirror substrate 101at the time when an edge 24 of the movable electrode 106 faces an edge36 of the driving electrode 113. When the swing angle is equal to orless than θ1, the electrostatic toque Trq2 is exerted in a direction inwhich the mirror substrate 101 is made distant from the neutral point ofvibration. When the swing angle is more than θ1, the electrostatictorque Trq2 is exerted in a direction in which the mirror substrate 101is drawn toward the neutral point of vibration. The electrostatic torqueTrq2 reaches the peak value at the angle θ2. Although the electrostatictorque exerted by the driving electrode 112 is similar to theelectrostatic torque Trq2 exerted by the driving electrode 113, thedirection is opposite.

In the second embodiment, the electrostatic torque is exerted by thefirst driving electrodes 107 and 108 and the second driving electrodes112 and 113 in the directions along which the mirror substrate 101 isdrawn toward the neutral point of vibration. The first drivingelectrodes 107 and 108 and the second driving electrodes 112 and 113 aredriven while being switched at the swing angle θo. That is, when theswing angle in the positive direction exceeds θo, the driving pulse isapplied to the driving electrode 113, and when the swing angle in thepositive direction is equal to or less than θo, the driving pulse isapplied to the driving electrodes 107 and 108. When the swing angle inthe negative direction exceeds θo, the driving pulse is applied to thedriving electrode 112, and when the swing angle in the negativedirection is equal to or less than θo, the driving pulse is applied tothe driving electrodes 107 and 108. Accordingly, the driving pulsesapplied to the driving electrodes 112 and 113 are shifted by 180°. Withsuch a driving method, the electrostatic torque by the second drivingelectrode is exerted only in the direction in which the speed ofvibration is accelerated. Thus, it is possible to effectively drive themirror substrate 101. In addition, compared to the case of the firstembodiment, the strength of the electrostatic torque exerted in an angleequal to or more than θ1 is greater. Hence, even if the driving pulse ofthe same voltage value is applied, it is possible to achieve a greaterswing angle in the second embodiment than in the first embodiment.

Third Embodiment

According to a third embodiment of the present invention, the drivingcircuit 230 may drive the vibration mirror 100B at a vibration frequencysimilar to that in the second embodiment by applying the driving pulseas shown in FIG. 10 to each of the electrodes 107, 108, 112 and 113. InFIG. 10, (A) represents the vibration waveform of the mirror substrate101, (B) represents the waveform of the driving pulse applied to thedriving electrodes 107 and 108, (C) represents the waveform of thedriving pulse applied to the driving electrode 112, and (D) representsthe waveform of the driving pulse applied to the driving electrode 113.

The driving pulse is applied to the driving electrodes 107 and 108 whenthe swing angle is equal to or less than θo. When the swing angleexceeds θo, the driving pulse is applied to the driving electrodes 112and 113. In the third embodiment, however, the driving pulse is appliedbefore and after the extreme value of the vibration waveform. That is,the driving pulse is applied to the driving electrode 112 before andafter the extreme value in the negative direction of the vibrationwaveform of the mirror substrate 101, and the driving pulse is appliedto the driving electrode 113 before and after the extreme value in thepositive direction of the vibration waveform. The driving pulse appliedbefore the extreme value exerts an electrostatic torque (repulsiveforce) in a direction separating the mirror substrate 101 from theneutral point of vibration. At such moment, since the mirror substrate101 is making a movement in the direction separating the mirrorsubstrate 101 from the neutral point of vibration, the electrostatictorque functions to increase the speed of the vibration. The drivingpulse applied after the extreme value exerts an electrostatic torque(attracting force) in a direction drawing the mirror substrate 101toward the neutral point of vibration. At such moment, since the mirrorsubstrate 101 is making a movement in the direction approaching theneutral point of vibration, the electrostatic force functions toincrease the speed of the vibration. As mentioned above, since the thirdembodiment uses both electrostatic attraction and electrostaticrepulsion exerted by the driving electrodes 112 and 113, it is possibleto achieve a swing angle greater than that achieved in a driving methodusing only electrostatic attraction.

Fourth Embodiment

In a fourth embodiment of the present invention, the driving circuit 230includes a means for varying the voltage value of the driving pulse withrespect to the driving electrodes 112 and 113 so as to adjust the swingangle. The electrostatic force exerted between the second electrodes 112and 113 and the movable electrodes 105 and 106 is proportional to thesquare of the voltage between electrodes. Hence, by varying the voltagevalue of the driving pulse, it is possible to increase and decrease theswing angle. The driving electrodes 112 and 113 may be driven by thedriving method of the second embodiment or the third embodiment.

Fifth Embodiment

According to a fifth embodiment of the present invention, though thedriving circuit 230 drives the vibration mirror 100B by a method similarto that in the second embodiment (FIG. 8), the driving circuit 230 mayinclude a means for varying the phase of the driving pulse applied tothe driving electrodes 112 and 113 so as to adjust the swing angle. Inother words, as shown in FIG. 11A, it is possible for theabove-mentioned means to delay the driving pulse (corresponding to thedriving pulse represented by (D) in FIG. 8) with respect to the drivingelectrode 113 by φ from a positive extreme value of the vibrationwaveform. Alternatively, as shown in FIG. 11B, it is possible for themeans to advance the driving pulse by φ from the positive extreme valueof the vibration waveform. Further, it is possible to vary φ in a fixedrange.

When there is a phase relationship as shown in FIG. 11A, theelectrostatic torque exerted by the driving electrode 113 functions toincrease the speed of vibration of the mirror substrate 101 toward theneutral point of the vibration. On the other hand, where there is aphase relationship as shown in FIG. 11B, the electrostatic torqueexerted by the driving electrode 113 functions to increase the speed ofvibration of the mirror substrate 101 toward a positive extreme value ofthe vibration. Additionally, depending on the value of φ, the magnitudeof the electrostatic torque to be exerted is varied (refer to FIG.9(B)). Accordingly, by changing the value of φ and negative/positive(advance/delay) of φ, it is possible to adjust the swing angle(vibration amplitude) of the mirror substrate 101. Although thedescription is given above of the case of the driving electrode 113, thedriving pulse with respect to the driving electrode 112 and the phase ofa negative extreme value of the vibration waveform of the driving pulseare varied in a similar manner. The vibration cycle of the vibrationmirror 100B is substantially determined by the cycle of the drivingpulse of the driving electrodes 107 and 108. Hence, in practice, thephases of the driving pulse applied to the driving electrodes 112 and113 are controlled on the basis of the driving pulse applied to thedriving electrodes 105 and 106.

Sixth Embodiment

A description is given below of a sixth embodiment of the presentinvention. FIG. 12 shows a general structure of an image formingapparatus 300A according to the sixth embodiment. FIG. 13 shows ageneral structure of an optical writing apparatus 301 of the imageforming apparatus 300A.

The image forming apparatus 300A shown in FIG. 12 includes a photoconductor drum 300 serving as an image carrier. A charged surface of thephoto conductor drum 300 is scanned by the optical writing apparatus 301with a laser light beam modulated with a recording signal, therebyforming an electrostatic latent image on the charged surface. Theelectrostatic latent image is developed with toner by a developingapparatus 302. The developed toner image is transferred by a transferapparatus 304 onto a recording paper (transfer medium) fed from apaper-feeding tray 303. Then, the developed toner image is fixed to therecording paper by a fixing apparatus 305. Since the general structureof the image forming apparatus 300A is similar to image formingapparatuses of a general electrophotography type, no further descriptionis given.

As shown in FIG. 13, the optical writing apparatus 301 includes aplurality of the above-mentioned optical scanning apparatuses 310arranged in a main scanning direction, and performs optical scanning(optical writing) by the optical scanning apparatuses 310 with respectto respective predetermined writing widths. Vibration mirrors of theoptical scanning apparatuses (200A and/or 200B) 310 are arranged in themain scanning direction. Driving circuits of the optical scanningapparatuses 310 may be arranged in a concentrated manner, and thepresent invention includes such a configuration. A semiconductor laser311 is provided for each of the optical scanning apparatuses 310. Eachsemiconductor laser 311 is modulated in accordance with an image signalgenerated by an image signal generator (not shown). An output laserlight beam of each semiconductor laser 310 is incident on a mirrorsubstrate of the vibration mirror of a corresponding optical scanningapparatus 310, and the photo conductor drum 300 is scanned with adeflected laser light beam. It should be noted that optical systems maybe provided between the semiconductor lasers 311 and vibration mirrorsof the optical scanning apparatuses 310 and/or between the vibrationmirrors and the photo conductor drum 300 if necessary. However, forsimplicity, illustration of such optical systems is omitted.

In the optical scanning apparatuses 310 according to the presentinvention, the swing angles of the mirror substrates are stableirrespective of variation in environmental temperature as mentionedabove. Hence, the optical writing widths of the optical writingapparatuses 301 are stable. Accordingly, it is possible for the imageforming apparatus according to the present invention to perform imageformation of high quality. In addition, compared to an optical scanningapparatus using a polygon mirror, the optical scanning apparatus using abeam-supported-type vibration mirror is more compact in size andinexpensive, consumes less electric power for driving, and produces lowoperation sound. It is obvious that such advantages are reflected to theimage forming apparatus as well as the optical writing apparatus 301.

According to the present invention, variation in the swing angle of thevibration mirror 100A, 100B due to, for example, variation inenvironmental temperature is reduced. Thus, it is possible to performstable optical scanning.

In an embodiment of the present invention, the mirror substrate 101 maybe driven by the first driving electrodes 107, 108 and the seconddriving electrodes 112, 113. Thereby, it is possible to increase theswing angle of the vibration mirror 100A, 100B and expand the scanwidth.

In an embodiment of the present invention, only an electrostatic torquethat increases the speed of vibration of the mirror substrate 101 may beexerted. Thereby, it is possible to effectively drive the mirrorsubstrate 101.

In an embodiment of the present invention, by using both electrostaticattraction and electrostatic repulsion exerted by the second drivingelectrodes 112, 113, it is possible to achieve a greater swing angle.

In an embodiment of the present invention, it is possible to adjust theswing angle of the vibration mirror 100A, 100B.

In an embodiment of the present invention, since the facing areasbetween the driving electrodes 107, 108 and the movable electrodes 105,106 are increased, it is possible to achieve a required swing angle witha lower driving voltage.

In an embodiment of the present invention, it is possible to realize aninexpensive and compact optical writing apparatus or image formingapparatus that can perform stable optical writing or stable imageformation. Additionally, it is also possible to reduce power consumptionand noise of the optical writing apparatus or the image formingapparatus.

Hereinafter, a description is given of a case where anelectrostatically-actuated vibration mirror is used as a vibrationmirror. The electrostatically-actuated vibration mirror is driven andvibrated by exerting an electrostatic force thereon. The presentinvention may be applied not only to such electrostatically-actuatedvibration mirror, but also to those vibration mirrors that use otherdriving means such as a piezoelectric driving element.

Seventh Embodiment

Referring to FIGS. 15 through 17, a description is given of an opticalscanning apparatus 1A according to a seventh embodiment of the presentinvention that seals the vibration space of a vibration mirror at thetime when characteristics of the vibration mirror fall within apermissible range. FIG. 15 is a top plan view of the optical scanningapparatus 1A. FIG. 16 is a cross-sectional view of the optical scanningapparatus 1A taken along the line A-A′ shown in FIG. 15.

Referring to FIGS. 15 and 16, the optical scanning apparatus 1A has astructure in which a base substrate 2A, a first substrate 3, a secondsubstrate 4, and a transparent substrate 5A, each having a rectangularshape, are stacked in this order from the bottom to the top.

A rectangular concave portion 2-1 is formed in the center portion of thebase substrate 2A. The concave portion 2-1 has an area and a depth thatdo not inhibit vibration of a vibration mirror 3-3 centered on a torsionbeam 3-2, which is described later. Openings 2-2 and 2-3, which areround through-holes, are formed outside the concave portion 2-1 in thelateral direction. Insulating materials 2-4 and 2-5 are filled in theopenings 2-2 and 2-3, respectively. Bar-like lead terminals 2-6 and 2-7penetrate through the center portions of the insulating materials 2-4and 2-5, respectively. The bar-like lead terminals 2-6 and 2-7 are heldby the insulating materials 2-4 and 2-5, respectively, in an insulatingmanner.

The torsion beam 3-2 and a strip mirror substrate 3-1 are integrallyformed with the first substrate 3 in the center portion of the firstsubstrate 3. In other words, the center portion of the first substrate 3is hollowed except for the torsion beam 3-2 and the mirror substrate3-1. The opening thus formed by hollowing the first substrate 3 isindicated by a reference numeral 3-17 in FIG. 31, which is laterdescribed in detail. The center portion of the strip mirror substrate3-1 is supported by the first substrate 3 via the torsion beam 3-2,which is an integral part of the first substrate 3, such that the mirrorsubstrate 3-1 can be oscillated.

The top surface of the mirror substrate 3-1 is a mirror surface 3-10.The vibration mirror 3-3 is formed by the mirror substrate 3-1 havingthe mirror surface 3-10 formed on the top surface thereof. Referring toFIGS. 15 and 16, a first comb-like movable electrode (hereinafterreferred to as “first movable electrode”) 3-4 is formed on the left endof the mirror substrate 3-3, and a second comb-like movable electrode(hereinafter referred to as “second movable electrode”) 3-5 is formed onthe right end thereof.

A first comb-like fixed electrode (hereinafter referred to as “firstfixed electrode”) 3-6 and a second comb-like fixed electrode(hereinafter referred to as “second fixed electrode”) 3-7 are formed inthe first substrate 3 with shapes that allow the first fixed electrode3-6 and the second fixed electrode 3-7 to engage with the first andsecond movable electrodes 3-4 and 3-5 in a non-contact manner. Arectangular opening 4-1 is formed in the center portion of the secondsubstrate 4. The rectangular opening 4-1 has a size that does notinhibit oscillation of the vibration mirror 3-3, which is turnedcentering on the torsion beam 3-2.

The substrate 5A protects the vibration mirror 3-3. The substrate 5A istransparent so that an external optical beam can enter the vibrationmirror 3-3 and a reflected light from the vibration mirror 3-3 can exitto the outside.

Referring to FIG. 16, rectangular elongated openings 3-8 and 3-9 areformed at positions outside the first and second fixed electrodes 3-6and 3-7, respectively. The first substrate 3 is covered with aninsulating film in the inner sides of the openings 3-8 and 3-9 and theouter peripherals, as indicated by heavy lines in FIG. 16.

The second substrate 4 is also covered with an insulating film in theinner sides of the opening 4-1 and the outer peripherals thereof, asindicated by heavy lines in FIG. 16. However, the insulating film isremoved from rectangular elongated regions 4-2 and 4-3 and therectangular regions 4-2 and 4-3 are electrically conductive. Therectangular regions 4-2 and 4-3 correspond to the openings 3-8 and 3-9formed in the first substrate 3, and are slightly smaller than theopenings 3-8 and 3-9, respectively.

The center portions of the rectangular regions 4-2 and 4-3, having noinsulating film, are located at the positions opposing the leadterminals 2-6 and 2-7, respectively. The center portions of therectangular regions 4-2 and 4-3 contact solder balls 6 having curvedsurface shapes and provided at respective ends of the lead terminals 2-6and 2-7, and the center portions of the rectangular regions 4-2 and 4-3are electrically connected to the lead terminals 2-6 and 2-7,respectively. The solder balls 6 and the lead terminals 2-6 and 2-7serve as conductive means. Thus, it is possible to apply a voltage fordriving the vibration mirror 3-3 to a third fixed electrode 4-4 and afourth fixed electrode 4-5 (which are described later) formed in thesecond substrate 4.

A third comb-like fixed electrode 4-4 and a fourth comb-like fixedelectrode 4-5 are formed in the second substrate 4 at the positionsopposing to the first fixed electrode 3-6 and the second fixed electrode3-7 of the first substrate 3, respectively. The third and fourth fixedelectrodes 4-4 and 4-5 have the shapes, pitches and phases that are thesame as those of the first and second fixed electrodes 3-6 and 3-7, sothat the third and fourth fixed electrodes 4-4 and 4-5 can engage withthe first and second movable electrodes 3-4 and 3-5 in a non-contactmanner, and can allow the first and second movable electrodes 3-4 and3-5 to pass through the third and fourth fixed electrodes 4-4 and 4-5.

An insulating groove (slit groove) 4-6 is formed in the second substrate4 such that the insulating groove 4-6 surrounds at least the rectangularregion 4-2 and the third fixed electrode 4-4 in common and communicateswith the opening 4-1. Similarly, an insulating groove (slit groove) 4-7is formed in the second substrate 4 such that the insulating groove 4-7surrounds at least the rectangular region 4-3 and the fourth fixedelectrode 4-5 in common and communicates with the opening 4-1.

Referring to FIGS. 16 and 31, an insulating groove 3-11 is formed in thefirst substrate 3 such that the insulating groove 3-11 surrounds an endportion of the torsion beam 3-2 located at the lower side of the torsionbeam 3-2 in the longitudinal direction thereof, and communicates withthe opening 3-17 of the first substrate 3 (refer to FIG. 31). Inaddition, a fifth fixed electrode 3-12 is formed outside the insulatinggroove 3-11. The fifth fixed electrode 3-12 is electrically connectedwith the first and second fixed electrodes 3-6 and 3-7 via the firstsubstrate 3 in common.

Referring to FIGS. 16 and 31, an insulating groove 3-14 is formed in thefirst substrate 3 such that the insulating groove 3-14 surrounds theother end portion of the torsion beam 3-2, which is located in the upperside of the torsion beam 3-2 in the longitudinal direction thereof, anda sixth fixed electrode 3-13 is provided in the vicinity of the endportion in common, and communicates with the opening 3-17 of the firstsubstrate 3 (refer to FIG. 31). The sixth fixed electrode 3-13 iselectrically connected to the first and second movable electrodes 3-4and 3-5, respectively, of the vibration mirror 3-3 via the torsion beam3-2 in common.

Application of a voltage or the like is performed on the fifth fixedelectrode 3-12 and the sixth fixed electrode 3-13 by using leadterminals (not shown) and solder balls (not shown) having similarstructures to those forming the conductive means used for therectangular regions 4-2 and 4-3.

As will be appreciated from FIGS. 15, 16 and 31, with the structure inwhich the base substrate 2A, the first substrate 3, the second substrate4, and the substrate 5A are integrally stacked in this order, anairtight chamber is formed, within which is sealed a vibration spaceformed by, for example, the concave portion 2-1, the opening 3-17, andthe opening 4-1, which are in communication with each other. Thevibration mirror 3-3 including the torsion beam 3-2 is located withinthe airtight chamber.

The base substrate 2A, the first substrate 3, the second substrate 4,and the substrate 5A surround the vibration mirror 3-3, therebyconstituting a package member that forms the vibration space for thevibration mirror 3-3.

By applying a voltage varied with time to the first movable electrode3-4, the second movable electrode 3-5, the first fixed electrode 3-6,the second fixed electrode 3-7, the third fixed electrode 4-4, and thefourth fixed electrode 4-5, an electrostatic force is exerted betweenthe movable electrodes (3-4, 3-5) and the fixed electrodes (3-6, 4-4,3-7, 4-5), and the vibration mirror 3-3 is vibrated centering on thetorsion beam 3-2.

As mentioned above, the basic structure of the optical scanningapparatus 1A, which exerts a driving force for oscillation on a part ofthe vibration mirror 3-3, includes: the vibration mirror 3-3 having themirror surface 3-10 that reflects an optical beam; the torsion beam 3-2supporting the vibration mirror 3-3 such that the torsion beam 3-2 isswingable; and the package member (the base substrate 2A, the firstsubstrate 3, the second substrate 4, and the substrate 5A) surroundingthe vibration mirror 3-3, thereby forming the vibration space for thevibration mirror 3-3.

In the above-mentioned embodiment, the substrate 5A is transparent.However, this is not a limitation, and the substrate 5A may betransparent only in the portion that is necessary for allowing anoptical beam to be incident on the vibration mirror 3-3.

A further description is given below of the optical scanning apparatus1A.

The base substrate 2A, the first substrate 3, the second substrate 4 andthe substrate 5A, which form the package member, may be bonded to eachother by selecting a preferable bonding method suitable for thematerials of the substrates from among solder bonding, glass bonding,epoxy adhesive bonding, for example.

In FIG. 16, the first substrate 3 and the second substrate 4 arereferred to as a micro mirror 001. In the exemplary embodiment, each ofthe first substrate 3 and the second substrate 4 is manufactured byusing a SOI (Silicon On Insulator) substrate formed by sandwiching aninsulating member between two silicon substrates. Also in the exemplaryembodiment, the structure of a substrate forming the vibration mirror3-3, which substrate includes two substrates, i.e., an upper substrateand a lower substrate, and an insulating member between the twosubstrates, is the same as that of the first substrate 3.

The mirror surface 3-10 is formed on a top surface of the lowersubstrate. The top surface of the lower substrate is exposed byperforming solution processing using an etching technique. The torsionbeam 3-2 is formed in the lower mirror substrate 3-1.

As mentioned above, the first fixed electrode 3-6 and the second fixedelectrode 3-7 are formed in the first substrate 3, and the third fixedelectrode 4-4 and the fourth fixed electrode 4-5 are formed in thesecond substrate 4. The positions of the first fixed electrode 3-6 andthe third fixed electrode 4-4 correspond to the first movable electrode3-4 of the vibration mirror 3-3, and the positions of the second fixedelectrode 3-7 and the fourth fixed electrode 4-5 correspond to thesecond movable electrode 3-5 of the vibration mirror 3-3.

In the aforementioned manner, by forming the above-mentioned electrodes3-4, 3-5, 3-6, 3-7, 4-4 and 4-5 into comb-like shapes, it is possible toreduce a driving voltage. In this embodiment, both the first substrate 3and the second substrate 4 are formed by SOI substrates having lowresistances, a metal is not formed, and the first substrate 3 and thesecond substrate 4 serve as electrodes.

Hence, in the first substrate 3, the insulating grooves (slit grooves)3-11 and 3-14 are formed therein as means for insulating and separatingthe first movable electrode 3-4 and the second movable electrode 305from the first fixed electrode 3-6 and the second fixed electrode 3-7,thereby achieving a function of insulation and separation.

In this embodiment, as mentioned above, the surface of the SOI substrateis used as the mirror surface by performing the etching process on theSOI substrate. As shown in FIG. 16, ribs RB may be provided on the backsurface of the vibration mirror 3-3 in parallel with the torsion beam3-2 so as to maintain rigidity while reducing the weight of thevibration mirror 3-3.

The substrate 5A and the base substrate 2A, which are locatedrespectively on and under the micro mirror 001, serve as the packagemembers that form the vibration space of the micro mirror 001 (moreparticularly, the vibration mirror 3-3).

The substrate 5A located on the micro mirror 001 and the base substrate2A located under the micro mirror 001 serve as sealing members that formthe vibration space for the micro mirror 001. In the last sealingprocess that adjusts the final air pressure in the vibration space, thevibration space is sealed by adjusting the air pressure therein whiledriving the vibration mirror 3-3 so that the characteristics of thevibration mirror 3-3 fall within the predetermined range.

When adjusting the air pressure in the vibration space and sealing thevibration space, the vibration space may be sealed in a state where apredetermined frequency range is achieved during adjustment of the airpressure with the vibration mirror 3-3 being driven. Additionally, in astructure where a plurality of optical scanning apparatuses are used asoptical scanning means, by providing means for adjusting the airpressure in the vibration space for an individual vibration mirror ineach of the optical scanning apparatuses, it is possible to furtherreduce variation in resonance frequency by using a shift in theresonance frequency due to pressure change. Further, it is possible toincrease a tolerance range for the driving frequency by using a flatfrequency characteristic in which a gain at a resonance point issuppressed, or by using a band outside a resonance peak (stable regionoutside resonance) as shown in FIG. 18.

By adjusting the air pressure in a vibration space and sealing thevibration space, it is possible to adjust characteristics (resonancefrequency and swing angle, for example) of a vibration mirror such asshown in FIGS. 19 and 20. Thus, it is possible to manufacture differentcharacteristics at the last of the manufacturing process of an opticalscanning apparatus. Accordingly, it is possible to manufacture productshaving different specifications at low costs. Inversely, as for productshaving the same specifications, it is possible to reduce variation inthe characteristics. For this reason, the rate of quality product isincreased since those products that are below standard andconventionally rated as defective products can be quality products byperforming the air pressure adjustment thereon. In addition, since thevibration space is sealed, resistance against variation in a resonancefrequency due to environmental change is obtained. Further, since theadjustment is performed at the last of the manufacturing process of anoptical scanning apparatus, the specification of the optical scanningapparatus can be easily matched to designed specifications. Thus, therate of quality product is increased. Furthermore, in an opticalscanning apparatus in which the air pressure is to be set to a ratherlow value, the effect of viscous resistance of gas is increased. Thus,damping effect generated between the gas and the structure that sealsthe vibration space for a vibration mirror particularly affects thecharacteristics of the optical scanning apparatus. In an embodiment ofthe present invention, however, since adjustment is performed at thetime of sealing while monitoring the characteristics, it is easier toobtain an optical scanning apparatus meeting specifications.

In addition to the optical scanning apparatus 1A shown in FIG. 16, thevibration space for the vibration mirror 3-3 may be sealed as in anoptical scanning apparatus 1B, which is shown in FIG. 17, having astructure in which the micro mirror 001 is enclosed by a base substrate2B and an upper cover 50. In the illustrated embodiment, a transparentboard 51 is used as a part of the upper cover 50 so that light can beincident on the vibration mirror 3-3 through the upper cover 50 andlight reflected by the vibration mirror 3-3 can exit the upper cover 50.In FIG. 17, those parts that are the same as those corresponding partsin FIG. 16 are designated by the same reference numerals, and adescription thereof is omitted.

Eighth Embodiment

A description is given below of an eighth embodiment of the presentinvention.

An optical scanning apparatus according to the eighth embodiment of thepresent invention includes an air pressure adjusting means for adjustingthe air pressure in a vibration space. A gas absorbent that can adjustthe air pressure in the vibration space such that a desired resonancefrequency is obtained may be used as the air pressure adjusting means.

FIGS. 21 and 22 show an optical scanning apparatus 1C and FIG. 23 showsan optical scanning apparatus 1D according to the eighth embodiment ofthe present invention. FIG. 21 is a top plan view of the opticalscanning apparatus 1C. FIG. 22 is a cross-sectional view of the opticalscanning apparatus 1C taken along the line A-A′ in FIG. 21. FIG. 23 is across-sectional view of the optical scanning apparatus 1D. The basicstructures of the optical scanning apparatuses 1C and 1D aresubstantially the same as those shown in FIGS. 15-16 and 17,respectively. Thus, in FIGS. 21 through 23, those parts that are thesame as those corresponding parts in FIGS. 15 through 17 are designatedby the same reference numerals, and a description thereof is omitted.

The eighth embodiment differs from the seventh embodiment in that an airpressure adjusting means for adjusting the air pressure in the vibrationspace for the vibration mirror 3-3 is provided. In the aforementionedseventh embodiment, the air pressure adjustment of the vibration space(sealed space) for the vibration mirror 3-3 is performed at the last ofthe manufacturing process of the optical scanning apparatus (1A, 1B). Onthe other hand, in the eighth embodiment, it is possible to perform theair pressure adjustment at the last of the manufacturing process orafter completion of the optical scanning apparatus 1C.

As shown in FIGS. 21 and 22, in the optical scanning apparatus 1Caccording to this embodiment, the insulating groove (slit groove) 4-6,which communicates with the vibration space for the vibration mirror 3-3that is formed by the concave portion 2-1 and the opening 4-1, may beused, and a gas absorbent 008 may be deposited in the insulating groove4-6. When sealing the vibration space for the vibration mirror 3-3 bystacking and bonding, for example, the substrate 5A, the micro mirror001, and the base substrate 2A to each other, by enclosing at the sametime a gas that can be absorbed by the gas absorbent 008, it is possibleto perform the air pressure adjustment by activating the gas absorbent008 by a method such as heating. Moreover, it is possible to adjust thecharacteristics of the vibration mirror 3-3.

Similarly, in an optical scanning apparatus 1D shown in FIG. 23, byusing the insulating groove 4-6, depositing therein the gas absorbent008, and enclosing the gas that is absorbed by the gas absorbent 008, itis possible to adjust the air pressure in the sealed oscillation space.

As shown in FIG. 19, in an optical scanning apparatus, the frequencycharacteristics of a vibration mirror are varied by changing the sealedair pressure in the vibration space for the vibration mirror. Hence,according to the eighth embodiment of the present invention, in a casewhere variation exists in resonance frequencies of a plurality of or alarge number of optical scanning apparatuses, it is possible to easilycontrol the resonance frequencies to fall within predetermined rangeswith which required swing angles are obtained.

Additionally, the sealed air pressure and the swing angle havecharacteristics (relationship) as shown in FIG. 20. Thus, by using thecharacteristics, it is possible to adjust optical scanning apparatuseshaving variations in their characteristics such that desired swingangles are obtained at an arbitrary driving frequency or a band afterthe vibration space is sealed. It should be noted that the air pressureadjusting means includes the insulating groove (slit groove) 4-6 or 4-7,the gas absorbent 008, and the enclosed gas, for example.

According to the eighth embodiment, it is possible to perform the airpressure adjustment after completion of the optical scanning apparatus.Hence, it is possible to perform further accurate adjustment. Inaddition, since it is possible to perform the air pressure adjustmentafter sealing, it is also possible to adjust variation in thecharacteristics caused by an outgas remaining in the sealed space thatmay be generated at the time of sealing, depending on a sealing method.

By adjusting the air pressure in the vibration space, it is possible toabsorb or reduce variation in a resonance frequency generated at thetime of manufacturing a vibration mirror. In addition, since thevibration space is sealed, resistance against variation in a resonancefrequency due to environmental change is obtained. Accordingly,considering the characteristics of the vibration mirror, by aligning thecharacteristics of resonance frequencies by the air pressure adjustment,it is possible to obtain an optical scanning apparatus that is stableand easy to handle. Further, the swing angle can be adjusted relativelyeasily by adjusting a driving voltage. On the other hand, when drivingby a common driving frequency, adjustment of a resonance frequencyrequires control by a complex driving system since the span ofadjustable range of the driving frequency is extremely narrow.Accordingly, by using the optical scanning apparatus according to theeighth embodiment, it is possible to provide an optical scanningapparatus that is stable and easy to be controlled.

FIGS. 21 through 23 show the case where means for absorbing the gas inthe vibration space, i.e., the gas absorbent 008, is used as the airpressure adjusting means. It is possible to achieve the method ofabsorbing the gas in the vibration space by depositing the gas absorbent008 in the vibration space, and, fundamentally, the gas absorbent 008may be activated merely by heating. Thus, it is possible to easilyadjust (for example, reduce) the air pressure in the vibration space,and it is possible to reduce variation in the characteristics of thevibration mirror by setting in advance the air pressure in the vibrationspace to a rather high value. Additionally, by using an absorbent suchas the gas absorbent 008, it is also possible to adjust variation in thecharacteristics caused by an outgas remaining in the sealed space thatmay be generated at the time of sealing, depending on a sealing method.

According to the eighth embodiment of the present invention, since it ispossible to adjust the air pressure in the vibration space after thevibration space is sealed, it is possible to adjust the air pressuretherein while actually using the vibration mirror. In the illustratedembodiment, the gas absorbent 008 is deposited in the insulating groove4-6, which is the slit groove. This is not a limitation, andessentially, the gas absorbent 008 may be deposited in an arbitraryplace, provided that the place communicates with the vibration space.However, it should be noted that there are some cases where it ispreferable to deposit the gas absorbent 008 at a location close to anouter surface of the vibration mirror for convenience in terms ofheating.

In a case where the gas absorbent 008 is made of a metal, depositing thegas absorbent 008 in the insulating groove 4-6, which is the slitgroove, may cause a malfunction whereby an electrical short occursbetween electrodes. Thus, in such case an additional slit groove ispreferably formed at a location where an electrical short will not occur(the same applies to the case of a gas release agent 009 shown in FIGS.24 and 25, which is described later).

As illustrated in FIG. 21, a slit groove 4-10 dedicated for depositing agas absorbent therein is formed in the second substrate 4. The slitgroove 4-10 has a U-shape and communicates with the opening 4-1.

The gas absorbent 008 (in this case, the gas absorbent 008 is made of ametal) is deposited in the slit groove 4-10. Of course, in this case,the gas absorbent 008 (made of the metal) is not deposited in theinsulating groove 4-6.

In an embodiment shown in FIGS. 24 and 25, which is described later, anadditional slit groove as mentioned above is not shown. However, whenusing an agent made of a metal, according to the above-mentioned case,slit grooves dedicated for respectively depositing therein the gasabsorbent 008 and the gas release agent 009 may be provided in thesecond substrate 4, and the gas absorbent 008 and the gas release agent009 may be deposited in the corresponding slit grooves.

It is possible to form the slit groove 4-10, which is dedicated fordepositing the gas release agent 009 therein, in a manner similar tothat of the insulating groove 4-6 and simultaneously with the insulatinggroove 4-6, which is advantageous in that manufacturing costs are notincreased.

A description is given below of variation in a resonance frequency.

Variation in a resonance frequency of a vibration mirror can beclassified into: individual variation due to variation in the shape of avibration mirror introduced during the manufacturing process thereof;variation due to variation in environmental temperature and/or humidity;and variation due to variation in the atmosphere pressure in the casewhere the vibration mirror is used in the atmosphere. When a greatvariation exists in the resonance frequency, there is a problem in thatit is difficult or impossible to drive a plurality of vibration mirrorswith a common driving frequency (since the span of adjustable range isnarrow).

There is a problem in that, in a case where the sealed air pressure isadjusted so as to align resonance frequencies, the swing angles of thevibration mirrors are also varied. However, as will be appreciated bycomparing the f-θ characteristic shown in FIG. 26 and the relationship(V-θ characteristic) between the driving voltage and the swing angleshown in FIG. 27, it is much more easy to adjust the swing angle withthe driving voltage. As will be appreciated from the V-θ characteristicshown in FIG. 27, in a normal usage region, a substantially proportionalrelationship is established between the driving voltage and the swingangle. Thus, it is possible to easily adjust the swing angle withoutusing a complex feedback circuit.

Alternatively, by setting the driving voltage to a high value, i.e.,making the initial swing angle large, from the beginning and using aswing angle equal to or smaller than the initial swing angle forscanning, it may not be necessary to adjust the driving voltage.

Accordingly, among the characteristics of the vibration mirror, byaligning the resonance frequencies by adjusting the air pressures in thesealed oscillation spaces for the vibration mirrors, it is possible toeasily adjust the swing angles.

By adjusting the air pressure in the vibration space, it is possible toabsorb or reduce variation in the resonance frequency generated duringthe manufacturing process of the vibration mirror. In addition, sincethe vibration space is sealed, resistance against variation in theresonance frequency due to environmental change is obtained.Accordingly, it is possible to realize an optical scanning apparatusthat is stable, easy to handle, and easy to control.

It should be noted that air pressure in the vibration space for thevibration mirror is adjusted, for example, by sealing the vibrationspace at the time when the characteristics of the vibration mirror fallswithin a permissible range while adjusting the air pressure therein, orby using the air pressure adjusting means.

In another embodiment of the present invention, the air pressure may beadjusted by discharging a gas into the vibration space. That is, insteadof using a gas absorbent, a gas release agent that discharges a gas isused. A method of discharging a gas into the vibration space can beachieved by depositing a gas release agent in the vibration space, andfundamentally, the gas release agent is activated merely by heating.Thus, it is possible to easily adjust (for example, increase) the airpressure in the vibration space. In addition, by setting in advance theair pressure in the vibration space to a somewhat low value, it ispossible to reduce variation in the characteristics of the vibrationmirror.

Ninth Embodiment

A description is given below of a ninth embodiment of the presentinvention.

In an optical scanning apparatus according to this embodiment, aplurality of kinds of gases mixed and introduced into the vibrationspace of the vibration mirror serve as the air pressure adjusting means.

In FIG. 28, the mechanical structure of an optical scanning apparatus1C′ is the same as that of the optical scanning apparatus 1C shown inFIG. 22. In this embodiment, the insulating groove 4-6 is used and thegas absorbent 008 is deposited therein as the air pressure adjustingmeans. A plurality of kinds of gases are mixed and introduced into thevibration space of the vibration mirror 3-3.

Upon adjustment of the air pressure, it is difficult to adjust the airpressure to a specific pressure with a single gas. When a plurality ofkinds of gases are mixed and used, it is possible to finely adjust theair pressure in the vibration space of the vibration mirror 3-3 byusing, for example, a method in which the gases are divided into themain gas (a) and the gas for air pressure adjustment (b), wherein aplurality of gases (c) and (d) having different masses are used as thegas for air pressure adjustment. Thus, it is possible to further reducevariation in the characteristics of the vibration mirror.

FIGS. 24 and 25 show an optical scanning apparatus 1A′ having aplurality of kinds of air pressure adjusting means. In FIGS. 24 and 25,the mechanical structure of the optical scanning apparatus 1A′ is thesame as that of the optical scanning apparatus 1A shown in FIGS. 15 and16.

In the illustrated embodiment, a case is shown where the gas absorbent008 is used in combination with the gas release agent 009 as theplurality of kinds of air pressure adjusting means. The gas absorbent008 is deposited in the insulating groove 4-6, and the gas release agent009 is deposited in the insulating groove 4-7. By depositing the gasabsorbent 008 and the gas release agent 009 in different places, it ispossible to quickly and stably adjust the air pressure.

In the case where a gas absorbent and a gas release agent, which act onthe air pressure in the opposite manners (in increasing and decreasingmanners) are used at the same time as mentioned above, flexibility inadjustment is high: for example, it is possible to adjust the airpressure in the vibration space in two ways (increase and decrease theair pressure); the span of adjustable range for the air adjustment ofthe vibration space may be increased; and it is also possible to performfine adjustment. Thus, it is possible to further reduce variation in thecharacteristics of a vibration mirror.

It should be noted that, in a case where a plurality of kinds of gasesthat act on the air pressure in the same direction are used, it ispossible to increase the adjustable range.

In cases where the gas absorbent 008 and the gas release agent 009 areused at the same time as the plurality of kinds of air pressureadjusting means, and where the gas absorbent 008 and the gas releaseagent 009 have different activation temperatures, it is possible tocoarsely and finely adjust the air pressure in the vibration spacemerely by varying the temperature. Thus, it is possible to furtherreduce variation in the characteristics of a vibration mirror.

In cases where the gas absorbent 008 and the gas release agent 009 areused at the same time as the plurality of kinds of air pressureadjusting means, and where the gas absorbent 008 and the gas releaseagent 009 are activated in different methods such as laser heating andresistance heating, it is possible to perform local activation and toperform coarse adjustment and fine adjustment of the air pressure in thevibration space. Thus, it is possible to further reduce variation in thecharacteristics of a vibration mirror.

By depositing the gas absorbent 008 and the gas release agent 009 indifferent places, for example, by depositing the gas absorbent 008 inthe insulating groove 4-6 and the gas release agent 009 in theinsulating groove 4-7 as mentioned above, that is, by depositing the gasabsorbent 008 and the gas release agent 009 in a divided manner, and byactivating the gas absorbent 008 and the gas release agent 009 by meansof local heating, it is possible to perform coarse adjustment and fineadjustment of the air pressure in the vibration space. Thus, it ispossible to further reduce variation in the characteristics of avibration mirror. In addition, it is easy to perform adjustment sincereaction further than desired is prevented during activation by heatingor the like.

Generally, absorbents for gases include inorganic absorbents (zeolite,silica gel, and porous glass, for example), organic absorbents(activated carbon and absorbent resin, for example), and catalyticmetals, for example. Here, in order to adjust the air pressure byabsorbing molecules of a gas (gases), an absorbent for selectivelydeveloping chemical absorption, which is an irreversible reaction,should be selected. FIG. 29 is a table showing chemical absorptioncharacteristics of various metals with respect to a plurality of gases.It is possible to develop chemical absorption by, for example, formingan oxide or a carbide (which serves as a stopper layer against chemicalreaction) on a surface of one of the metals, and heating the metal sothat the oxide or carbide thereon is diffused into the metal, therebyexposing and activating the surface of the metal. In addition to thosemetals listed in the table shown in FIG. 29, a “sintered material” suchas Zr—V—Fe may be used. The sintered material may be used since it ispossible to manufacture the sintered material to be porous and thus alarge specific surface area is obtained.

When providing a gas release agent, a method of using physicalabsorption, which is a reversible reaction, may be used. For example, agas release agent may be provided by preparing an activated carbon thatis caused to physically absorb nitrogen at low temperature, and heatingthe activated carbon later so as to stop or reduce physical absorption.

In cases where a gas absorbent is used, for example, as shown in thetable of FIG. 29, since some materials have the property of highabsorptivity and others do not, using a plurality of gases makes itpossible to perform adjustment.

In an embodiment of the present invention, a tolerable range forvariation in the driving frequency may be increased. In fθcharacteristic shown in FIG. 26, by using a flat band that is outsidethe resonance peaks, i.e., “stable region outside resonance”, it ispossible to increase the tolerable range for variation in the drivingfrequency. The wider the stable region outside resonance is, the better.In order to expand the stable region outside resonance, the gain at aresonance point should be suppressed. Thereby, a flat frequencycharacteristic having an expanded stable region outside resonance isobtained.

Tenth Embodiment

A description is given below of a tenth embodiment of the presentinvention. Hereinafter, a description is given of the structure of alaser printer as an example of an image forming apparatus that includes:optical scanning means including an optical scanning apparatus(vibration mirror module) having the above-mentioned structure and anoptical system such as a lens for scanning; a photo conductor on whichan electrostatic image is formed, the photo conductor mounting theoptical scanning means; developing means for developing theelectrostatic image by toner; and transfer means for transferring thedeveloped toner image on a sheet medium.

FIG. 30 shows, among the optical scanning apparatuses of the embodimentsdescribed above, an optical scanning apparatus constructed by combining:the first substrate 3; the second substrate 4; the substrate 5A, whichis described with reference to FIG. 16 and serves as an upper substratethat forms a package member; and the base substrate 2A, which is shownin FIG. 16 and serves as a base substrate that forms the package member.Here, the optical scanning apparatus is explained as a vibration mirrormodule 130A. The details of the structure are common with thosedescribed above except for the combination of the members.

In FIG. 30, the substrate constituting a vibration mirror is formed bybonding the first substrate 3, which is formed by two Si substrates, andthe second substrate 4 via an insulating film such as an oxide film. Thefirst substrate 3 is formed by the Si substrate having the thickness of60 μm. The vibration mirror 3-3, which serves as a movable mirror, andthe torsion beam 3-2, which supports the vibration mirror 3-3 whileserving as an axis on the same line, are formed in the first substrate 3by etching. In other words, the vibration mirror 3-3 and the torsionbeam 3-2 are formed by cutting off the surrounding portion thereof inthe first substrate 3 such that portions corresponding to the vibrationmirror 3-3 and the torsion beam 3-2 remain therein. Hereinafter, theportion of the first substrate 3 other than the vibration mirror 3-3 andthe torsion beam 3-2 is referred to as a fixed frame 3-16.

The vibration mirror 3-3 is formed symmetrically with respect to thetorsion beam 3-2, comb-like concavity and convexity (the movableelectrodes 3-4 and 3-5) are formed on both edges of the vibration mirror3-3, and the first fixed electrode 3-6 and the second fixed electrode3-7, which are comb-like concavity and convexity having a gap of severalmicrometers, are formed in the inner edges of the fixed frame 3-16 so asto engage with the movable electrodes 3-4 and 3-5.

There are several methods for forming a reflection surface formed on asurface of the vibration mirror 3-3. Here, the reflection surface isformed by depositing a metal film of, for example, Au, and thesubstrates (the first substrate 3 and the second substrate 4) per se areindividually formed as electrodes by separating the substrates intoislands while being bonded via the insulating layer as shown in FIGS. 30and 31.

In FIGS. 30 and 31, the concavity and convexity on both edges of thevibration mirror 3-3 form the first movable electrode 3-4 and the secondmovable electrode 3-5 (having the same potential though being separatedfor convenience of explanation), and the concavity and convexity of thefixed frame 3-16 opposing to the first movable electrode 3-4 and thesecond movable electrode 3-5 respectively form the first fixed electrode3-6 and the second fixed electrode 3-7.

In FIGS. 30 and 32, the second substrate 4 is formed by a Si substratehaving the thickness of 140 μm. The center portion of the secondsubstrate 4 is hollowed such that a predetermined shape is formed in thehollowed portion. In other words, comb-like concavity and convexity areformed on the inner edges of the hollowed portion, which inner edgesoverlap with the concavity and convexity formed in the fixed frame 3-16,such that the outer shape of the comb-like concavity and convexityformed on the inner edges of the hollowed portion match that of theconcavity and convexity formed in the fixed frame 3-16. Similarly to thefirst fixed electrode 3-6 and the second fixed electrode 3-7, theconcavity and convexity formed on the inner edges of the hollowedportion serve as the third fixed electrode 4-4 and the fourth fixedelectrode 4-5. Along with oscillation of the vibration mirror 3-3, thefirst movable electrode 3-4 and the second movable electrode 3-5 passthrough the third fixed electrode 4-4 and the fourth fixed electrode 4-5in an engaging manner.

In this embodiment, voltage pulses having the same phase are applied tothe first fixed electrode 3-6 and the second fixed electrode 3-7. Avoltage pulse having the phase ahead of the voltage pulse applied to thefirst fixed electrode 3-6 and the second fixed electrode 3-7. On theother hand, a voltage pulse having a phase delayed from the voltagepulse applied to the first fixed electrode 3-6 and the second fixedelectrode 3-7 is applied to the fourth electrode 4-5.

FIG. 33 shows electrostatic torque generated between the electrodes inaccordance with the swing angle of the vibration mirror 3-3. FIG. 34shows a partial cross-sectional view of the vibration mirror module130A. In this embodiment, electrostatic torque T exertedcounterclockwise, i.e., in the direction indicated by an arrow in FIG.34 (hereinafter referred to as “the positive direction”), is assumed tobe positive.

{circle around (1)} In an initial state, the vibration mirror 3-3 ishorizontal. When a voltage is applied to the third fixed electrode 4-4,an electrostatic force is generated between the third fixed electrode4-4 and the opposing first movable electrode 3-4 in the negativedirection (the direction opposite to the direction indicated by thearrow in FIG. 34). Consequently, the vibration mirror 3-3 is rotatedwhile twisting the torsion beam 3-2 until the swing angle is reachedthat balances with the restoring force of the torsion beam 3-2.

{circle around (2)} When application of the voltage to the third fixedelectrode 4-4 is cancelled, the vibration mirror 3-3 is rotated in thepositive direction to be horizontal by the restoring force of thetorsion beam 3-2. By applying a voltage to the first fixed electrode 3-6and the second fixed electrode 3-7 immediately before the vibrationmirror 3-3 returns to be horizontal, an electrostatic force in thepositive direction is generated, and the vibration mirror 3-3 becomeshorizontal.

{circle around (3)} By successively applying a voltage to the fourthfixed electrode 4-5 (see FIG. 30), the electrostatic torque T in thepositive direction is increased. Consequently, the vibration mirror 3-3is rotated while twisting the torsion beam 3-2 until the swing angle isreached that balances with the restoring force of the torsion beam 3-2.

{circle around (4)} When application of the voltage to the fourth fixedelectrode 4-5 is cancelled, the vibration mirror 3-3 is rotated to behorizontal by the restoring force of the torsion beam 3-2. By applying avoltage to the first fixed electrode 3-6 and the second fixed electrode3-7 immediately before the vibration mirror 3-3 becomes horizontal, anelectrostatic force is exerted in the negative direction, and thevibration mirror 3-3 becomes horizontal.

{circle around (5)} When a voltage is applied to the third fixedelectrode 4-4, an electrostatic force in the negative direction isgenerated between the third fixed electrode 4-4 and the first movableelectrode 3-4. Consequently, the vibration mirror 3-3 is rotated whiletwisting the torsion beam 3-2.

As mentioned above, by switching the electrodes in a repeated manner,the vibration mirror 3-3 is caused to perform a reciprocating operationsuch that the vibration mirror 3-3 is swung at the swing angle (forexample, approximately 2° in this embodiment) that allows the firstmovable electrode 3-4 and the second movable electrode 3-5 to passthrough the respectively opposing first fixed electrode 3-6 and secondfixed electrode 3-7.

By designing the moment of inertia of the vibration mirror 3-3 and thewidth and length of the torsion beam 3-2 such that a desired drivingfrequency used in scanning falls within the band of a primary resonancemode using the torsion beam 3-2 as the rotational axis, the vibrationmirror 3-3 is excited and the amplitude is significantly increased. Inthe afore mentioned manner, it is possible to increase the swing angleof the vibration mirror 3-3 to such an angle at which the first movableelectrode 3-4 and the second movable electrode 3-5, which are on bothedges of the vibration mirror 3-3, pass through the respectivelyopposing third fixed electrode 4-4 and the fourth fixed electrode 4-5.

Hence, even if the vibration mirror 3-3 is rotated to pass through thethird fixed electrode 4-4 and the fourth fixed electrode 4-5, anelectrostatic force is generated in a direction in which the vibrationmirror 3-3 is rotated to be horizontal, i.e., in this case, such thatthe third fixed electrode 4-4 draws the first movable electrode 3-4. Inother words, an electrostatic force in the positive direction is exertedon the vibration mirror 3-3. Hence, it is possible to increase the rangefor swing angle in which the electrostatic torque is exerted, and tomaintain a great swing angle even at a driving frequency outside aresonance frequency.

FIG. 18 shows the characteristics of the swing angle with respect to thedriving frequency. Referring to FIG. 19, the greatest swing angle isachieved when the driving frequency is matched to the resonancefrequency. However, the swing angle has a characteristic that the swingangle varies sharply in the vicinity of the resonance frequency.

Accordingly, there is a disadvantage in that, though it is possible toinitially set the driving frequency applied to the fixed electrode bythe driving controller of the vibration mirror 3-3 to match theresonance frequency, when the resonance frequency is varied because oftemperature change etc., the swing angle is significantly reduced, whichresults in poor stability.

In addition, there is a problem in that, when a plurality of vibrationmirrors are used as in the embodiments described later, it is difficultor impossible to drive the vibration mirrors with a common drivingfrequency, since the resonance frequency peculiar to each of thevibration mirrors may be varied.

Therefore, in this embodiment, the driving frequency is set in afrequency band that is in the vicinity of the resonance frequencypeculiar to a vibration part, which is formed by the vibration mirror3-3 and the torsion beam 3-2, and that is higher than the resonancefrequency where variation in the swing angle is relatively small. Forexample, the driving frequency may be set to 2.5 kHz with respect to theresonance frequency of 2 kHz, and the swing angle may be set to ±5° byadjusting the gain of an application voltage.

Upon setting of the driving frequency, it is preferable to set thedriving frequency in a frequency band (for example, 2.303 Hz or more, or1.697 or less, where the resonance frequency is 2 kHz) where the drivingfrequency is not affected even if there is variation in the resonancefrequency due to error made during processing of the vibration mirror3-3 (in this embodiment, 300 Hz) and variation in the resonancefrequency because of temperature change (in this embodiment, 3 Hz).

Assuming the size of the vibration mirror 3-3 as: vertical length=2a,horizontal length=2b, thickness=d, length of torsion beam 3-2=L, andwidth=c, by using the density ρ and material constant G of Si, moment ofinertia I and spring constant K are represented as follows.I=(4abρd/3)·aˆ2K=(G/2 L)·{cd(cˆ2+dˆ2)/12}

The resonance frequency f is represented as follows.$\quad\begin{matrix}{f = {( {{1/2}\pi} ) \cdot {( {K/I} )\bigwedge{1/2}}}} \\{= {( {{1/2}\pi} ) \cdot {\{ {{{{Gcd}( {{c\bigwedge 2} + {d\bigwedge 2}} )}/24}{LI}} \}\bigwedge{1/2}}}}\end{matrix}$

Since the swing angle θ and the length L of the torsion beam 3-2 is aproportionality relationship, the swing angle θ is represented asfollows.θ=A/Ifˆ2 (A: constant)The swing angle θ is in inverse proportion to the moment of inertia I.In order to increase the resonance frequency f, the moment of inertia Imust be decreased. Otherwise, the swing angle θ is reduced.

Hence, in this embodiment, the moment of inertia I is reduced toapproximately ⅕ by etching the surface of vibration mirror 3-3 that isopposite to the reflection surface such that the portion having thethickness d is left in a grid pattern, and those portions other than thegrid pattern portion have the thickness of d/10 or less.

The parameters affecting the moment of inertia I, and errors in the sizeof the torsion beam 3-2, for example, cause variation in the resonancefrequency.

On the other hand, electrostatic force F between the electrodes isrepresented as:F=∈HVˆ2/2δwhere ∈ is dielectric constant of air, the length of electrode is H,application voltage is V, and the distance between the electrodes is δ.The swing angle θ may be represented as follows.θ=B·F/I (B: constant)The longer the length of the electrode is, the greater the swing angle θbecomes. By forming the electrodes into the comb-like shapes, thedriving torque 2n times the original torque is obtained, where “n”represents the number of teeth of the electrode. In the aforementionedmanner, the length of the outer peripheral of each electrode is made aslong as possible so as to increase the length of the electrode, so thata great electrostatic torque is obtained with a low voltage.

Viscous resistance P of air is represented as:P=C·ηνˆ2·Eˆ3 (C: constant)where ν is the speed of the vibration mirror 3-3, E is the area of thevibration mirror 3-3, and η is the intensity of air. The viscousresistance P of air acts against rotation of the vibration mirror 3-3.

In this embodiment, the vibration mirror substrate (micro mirror 101B)(FIG. 30) constructed by joining the first substrate 3 and the secondsubstrate 4 together is mounted on the base substrate 2B having leadterminals and the concave oscillation space for the vibration mirror3-3, such that the reflection surface of the vibration mirror 3-3 facesup and the torsion beam 3-2 is arranged along the line connecting a pairof V-grooves 2B-1 and 2B-2 formed on outer edges of the base substrate2B. The substrate 5A, which is a cover formed into a cap like shape, isjoined to the upper surface of the second substrate 4, thereby sealingthe vibration space for the vibration mirror 3-3. An inert gas isintroduced into the vibration space so as to hermetically seal thevibration space. Considering the driving voltage, for example, the airpressure is suitably adjusted within the range of approximately 0.1-10torr. An optical beam enters and exits the cover (substrate 5A) via aslit window 5A-1 formed therein.

Referring to FIG. 30, a first opposing mirror 014 and a second opposingmirror 014′, which are disposed oppose to the vibration mirror 3-3, areformed, for example integrally, with the substrate 5A in the inner sidethereof along the direction perpendicular to the torsion beam 3-2. Thefirst opposing mirror 014 and the second opposing mirror 014′ are formedby depositing a metal film on inclined surfaces that are inclined at 9°and 26.3° with respect to a substrate surface so that the inclinedsurfaces form the angle of 144.7° while interposing the slit window 5A-1therebetween and serve as a pair of reflection surfaces. Theabove-mentioned metal film is not deposited on the slit window 5A-1.Hence, it is possible for an optical beam to pass through the slitwindow 5A-1.

The bottom surface of the substrate 5A is formed to be parallel to themirror surface, which is the top surface, of the vibration mirror 3-3.The bottom surface of the substrate 5A abuts and is joined to the topsurface of the frame portion of the second substrate 4. Indexes 4-8 forpositioning the first opposing mirror 014 and the second opposing mirror014′ are formed on corners of the second substrate 4 by etching. Thesubstrate 5A is positioned on the second substrate 4 such that the edgesof the first opposing mirror 014 and the second opposing mirror 014′match the indexes 4-8. Hence, it is possible to correctly arrange thefirst opposing mirror 014 and the second opposing mirror 014′ in themain scanning direction.

FIG. 35 is a cross-sectional view of an optical scanning means includingan optical scanning apparatus and a scanning optical system taken alongthe sub-scanning direction. FIG. 36 is an exploded perspective view ofthe optical scanning means. FIG. 37 shows an arrangement of opticaldevices. Referring to FIGS. 35 through 37, semiconductor lasers 101,which are light sources, are press fit into stepped through-holes 103,which are provided in walls that are set up on a frame member 102, fromthe rear surfaces of the wall. The optical axis directions aredetermined by making the collar surfaces of the semiconductor lasers 101contact with steps of the through-holes 103. Coupling lenses 110 arefixed to U-shaped concave portions 105 (FIGS. 35 and 36) by curing a UVadhesive between the coupling lenses 110 and the concave portions 105 bypositioning light emitting points and the optical axis directions suchthat the optical axes of the coupling lenses 110 match the optical axesof the semiconductor lasers 101, and outgoing beams become parallelbeams (the coupling lenses 110 are fixed into the concave portions 105such that the optical axes of the coupling lenses 110 coincide with therespective optical axes of the semiconductor lasers 100, and such thatoptical beams emitted through the respective lenses are parallel).

In this embodiment, three light sources (semiconductor lasers 101) areprovided, and each of the light sources has the same structure.

Optical beams that exit from the coupling lenses 110 are made incidenton cylinder mirrors 136 having a negative curvature in the sub-scanningdirection. The cylinder mirrors 136 are arranged on and bonded tocorresponding pairs of mounting members 109 having slanted faces. Theoptical beams reflected by the cylinder mirrors 136 enter the slitwindows 5A-1 (FIG. 35) of the vibration mirror modules (optical scanningapparatuses) 130B as converging beams converging on surfaces of thevibration mirrors in the sub-scanning direction.

The vibration mirror modules 130B are inserted in corresponding squareopenings 104 (FIG. 35), having a stage on the bottom surface side of theframe member 102, from the back side of the square openings 104, and arepositioned based on the outer edges of the base substrates 2B such thatthe direction of the torsion beams 3-2 match the optical axis direction.The surfaces of the vibration mirrors 3-3 are positioned by making thecollar surfaces contact the stage portions. In this embodiment, thethree vibration mirror modules 130B are positioned by the single framemember 102 with even intervals (FIG. 36).

Lead terminals projecting from the bottom surface of the base substrate2B of each of the vibration mirror modules 130B are inserted into andsoldered to respective through-holes of a print-circuit board 112 (FIG.36). Each of the vibration mirror modules 130B is fixed to the framemember 102 by making the top surface of the base substrate 2B contactand fill the lower opening (stage portion) of the square opening 104.Hence, circuits are connected.

Synchronism detecting sensors 113, electronic components constitutingdriving circuits of the semiconductor lasers 101, and electroniccomponents constituting driving circuits of the vibration mirrors 3-3are mounted on the print-circuit board 112. Wiring with externalcircuits is collectively performed. Cables 115, having ends connected tothe print-circuit board 112, are connected to the lead terminals of thesemiconductor lasers 101.

FIG. 35 shows a cross-sectional view of the optical scanning means takenalong the sub-scanning direction. Optical beams emitted from thesemiconductor lasers 101 enter the vibration mirrors 3-3 in thesub-scanning cross sections (refer to FIG. 36 for the sub-scanning crosssections) including the torsion beams 3-2 at an angle of approximately20° inclined in the sub-scanning direction with respect to the normalline via the coupling lenses 110, the cylinder mirrors 136, and the slitwindows 5A-1. The optical beams incident on the mirror surfaces formedon the surfaces of the vibration mirrors 3-3 are reflected and reach thefirst opposing mirrors 014. The optical beams that reach the firstopposing mirrors 014 are reflected and returned to the vibration mirrors3-3. The optical beams returned to the vibration mirrors 3-3 arereflected and made incident on the second opposing mirrors 014′ via theslit windows 5A-1. The reflection positions of optical beams that aremade incident on the mirror surfaces are moved in the sub-scanningdirection while performing three round trips between the vibrationmirrors 3-3 and the second opposing mirrors 014′. That is, optical beamsthat enter the slit windows 5A-1 exit from the slit windows 5A-1 afterbeing reflected by the vibration mirrors 3-3 five times in total.

In this embodiment, the optical path length is reduced by repeatingreflections for a plurality of times in the aforementioned manner sothat a great scanning angle is achieved even if the swing angle of thevibration mirror 3-3 is small. The scanning angle θ may be representedby 2Nα where N is the total number of times of reflections and α is theswing angle.

In this embodiment, since N=5 and α=5°, the maximum scanning angle is50°. 35° of the maximum scanning angle 50° serve an image recordingregion. By using resonance, minute application voltage is required andheat generation is also small. However, as is clear from the aboveequation, the more the recording speed, i.e., the resonance frequency,is increased, the more necessary it becomes to increase the springconstant K of the torsion beam 3-2, which results in reduction of theswing angle. Therefore, the scanning angle is increased by providing thefirst opposing mirror 014 and the second opposing mirror 014′ asmentioned above, so as to achieve an adequate scanning angleirrespective of the recording speed.

Additionally, the reflection surfaces are arranged in an opposing mannerso as to form a room-like shape, and the incident angle of an opticalbeam with respect to the vibration mirror 3-3 in the sub-scanningdirection is assigned to be positive or negative, in other words, thetraveling direction of a reflected optical beam is determined to be inthe right direction or the left direction, for each reflection. Thereby,skew of a scanning line on a surface to be scanned caused by obliqueincidence is suppressed and linearity is maintained, and the rotation ofan optical beam within a surface orthogonal to the optical axis is madeto return to the original position at the time of exiting. In theaforementioned manner, degradation in imaging performance is prevented.

Referring to FIGS. 35 and 36, a total of four synchronism detectingsensors 113, which are formed by pin photo diodes, are arranged at bothends of the group of vibration mirror modules 130 and between theadjacent vibration mirror modules 130 so that an optical beam can bedetected at the scan start side and the scan end side of each of thevibration mirror modules 130. V-shaped mirror receiving parts 128 onwhich high-intensity aluminum thin sheets are applied are formed in ahousing 106 between scan regions of second scanning lenses 117 and onthe light-emitting side of the second scanning lenses 117. Thereflection surfaces corresponding to the scan start side and the scanend side of the adjacent optical scanning means are arranged in anopposing manner so that optical beams reflected by the high-intensityaluminum thin plates are directed to the respective synchronismdetecting sensors 113 via openings 129 formed between the scan regionsand rectangular openings 150 of the frame member 102.

Referring to FIG. 36, the frame member 102 is made of a glass-fiberreinforced resin or die-casting aluminum, for example, with which acertain level of rigidity can be secured. Flange parts 131 and 133 areformed on both ends of the frame member 102. The flange parts 131 and133 are provided for attaching the optical scanning means to thestructure of an image forming apparatus body. The flange part 131 isprovided with a master hole, and the shank of a fixing screw 132 isengaged with the inside diameter of the master hole. The flange part 133is provided with a long opening, and a fixing screw 132 penetrates thelong opening. The frame member 102 is fixed by means of the fixingscrews 132 via respective spring washers 134 in a manner facing photoconductors.

On this occasion, by rotating the optical scanning means on the masterhole, adjustment is performed such that a scanning line scanned by oneof the vibration mirror modules 130B becomes parallel to a direction xthat is orthogonal to the moving direction y of the surface to bescanned (refer to FIG. 37).

The top surface of the frame member 102 is made parallel to surfacesprovided on the back side of the square openings 104 and in the mirrornormal line direction to which surfaces the vibration mirror modules130B abut. Two projections 135 projecting from the bottom surface of thehousing 106 containing scanning lenses (first scanning lenses 116 andthe second scanning lenses 117) are inserted into engaging holes of theframe member 102, thereby performing positioning on the surface andscrew shutting the four corners. In this embodiment, screws 137 arescrewed to the printed-circuit board 112 via through-holes of the framemember 102. The three members, i.e., the housing 106, the frame member102 and the print-circuit board 112, are integrally joined to interposethe frame member 102 between the housing 106 and the print-circuit board112. Thereafter, the above-mentioned soldering is performed.

In the housing 106, the first scanning lenses 116 and the secondscanning lenses 117, which form imaging means, are arranged in the mainscanning direction, positioned such that each scan region overlaps tothe other, and are integrally held.

Each of the first scanning lenses 116 includes: a projection 120 (FIGS.36 and 37) projecting in the middle of a sub-scanning directionreference surface and allowing positioning in the main scanningdirection; and surfaces 119 on the light entering side and the lightemitting side thereof. The surfaces 119 are engaged with the housing106, thereby positioning the first scanning lens 116 in the optical axisdirection. The projection 120 is engaged with a groove 122 integrallyformed in the housing 106. The surfaces 119 are inserted into a pair ofnotches 121. The first scanning lens 116 is pressed toward the lightentering side by means of springs 143 so as to maintain a position inthe surface. In the aforementioned manner, the scanning lenses arerelatively arranged within the same surface that is orthogonal to theoptical axis. By making the sub-scanning direction reference surfacecontact with an end of a pair of projections 142 projecting from thehousing 106, positioning of the first scanning lens 116 within thesurface orthogonal to the optical axis is performed. Consequently, theinstallation height in the sub-scanning direction is determined. Thefirst scanning lens 116 is pressed and supported by leaf springs 141integrally formed with a cover 138.

Similarly, each of the second scanning lenses 117 includes: a projection123 (FIGS. 36 and 37) projecting in the middle of a sub-scanningdirection reference surface and similarly allowing positioning in themain scanning direction; and surfaces 144 on both sides thereof. Thesurfaces 144 allow positioning in the optical axis direction. Theprojection 123 is engaged with a groove 122 integrally formed with thehousing 106. The surfaces 144 are inserted into notches 121, and thesecond scanning lens 117 is pressed toward the light emitting sidethereof by means of springs 143 so as to maintain a predeterminedposition. The installment height of the second scanning lens 117 isdetermined by making the sub-scanning direction reference surfacecontact with: a projection 145 projecting from the housing 106; and anend of an adjusting screw 146 that can be flexibly screwed. The secondscanning lens 117 is pressed and supported by leaf springs 141integrally formed with the cover 138. The cover 138 is fixed by means ofscrews 147.

Referring to FIG. 38, a description is given of a tandem laser printer(as an example of an image forming apparatus) that includes four opticalscanning means 500-1, 500-2, 500-3 and 500-4 as described above withreference to FIGS. 35 through 37, each optical scanning means includingthe optical scanning apparatus (vibration mirror module) according tothe present invention and a scan optical system such as an imaging lens.

The four optical scanning means 500-1, 500-2, 500-3 and 500-4 areconfigured to form images of yellow, magenta, cyan, and black. Photoconductor drums 504-1, 504-2, 504-3 and 504-4, which serve as photoconductors on which electrostatic images are formed, respectivelycorrespond to the four optical scanning means 500-1, 500-2, 500-3 and500-4.

Images of respective colors are formed on the photo conductor drums504-1, 504-2, 504-3 and 504-4 by means of the optical scanning means500-1, 500-2, 500-3 and 500-4, respectively. A transfer belt 501 isarranged underneath the photo conductor drums 504-1, 504-2, 504-3 and504-4 such that the transfer belt 501 contacts in common with each ofthe photo conductor drums 504-1, 504-2, 504-3 and 504-4. In theembodiment shown in FIG. 38, each of the optical scanning means 500-1,500-2, 500-3 and 500-4 is arranged such that the exiting direction of anoptical beam is in a downward direction.

The transfer belt 501 is supported by a driving roller R1 and twosupporting rollers R2 and R3. The photo conductor drums 504-1, 504-2,504-3 and 504-4 are arranged along the moving direction of the transferbelt 501, which direction is indicated by an arrow in FIG. 38, at evenintervals.

Charger 503-1, 503-2, 503-3 and 503-4; developing apparatuses 502-1,502-2, 502-3 and 502-4 that perform developing by means of tonerscorresponding to respective colors, i.e., yellow, magenta, cyan, andblack; and cleaning apparatuses 508-1, 508-2, 508-3 and 508-4 that wipeaway and stock residual toners after transferring are arranged aroundthe photo conductor drums 504-1, 504-2, 504-3 and 504-4, respectively.

In each of the photo conductor drums 504-1, 504-2, 504-3 and 504-4, alaser beam for scanning is directed from the optical scanning means to aposition between the corresponding charger (503-1, 503-2, 503-3 and503-4) and the developing apparatus (502-1, 502-2, 502-3 and 502-4),thereby forming an electrostatic image in accordance with imageinformation of a color corresponding to the optical scanning means.

In order to form overlapping images at the same position on the transferbelt 501, the timings of starting image writing by the optical scanningmeans 500-1, 500-2, 500-3 and 500-4 by means of laser beams for forminglatent images are shifted to each other. A sensor 505 detects a resistmark formed on the transfer belt 501 for setting the shifting timings.

In the aforementioned manner, writing of an image is performed by eachof the optical scanning means 500-1, 500-2, 500-3 and 500-4 at a timingshifted to each other by a predetermined amount while using a detectionsignal detected by the sensor 505 as a trigger.

Electrostatic latent images formed on the photo conductor drums 504-1,504-2, 504-3 and 504-4 are made visible by toner developing by means ofthe developing apparatuses 502-1, 502-2, 502-3 and 502-4 arranged in thedownstream side of the rotational direction of the photo conductor drums504-1, 504-2, 504-3 and 504-4, respectively. Then, the images areconsecutively transferred from the photo conductor drums 504-1, 504-2,504-3 and 504-4 onto the same image region of the transfer belt 501.Consequently, an overlapping color toner image is formed.

The overlapping color toner image is transferred, by means of asecondary transfer part in which a driven roller R2 and a transcriberare arranged in an opposing manner, onto a paper S that is fed from apaper feed tray 509 by means of a paper feed roller 506 and further fedafter adjusting the timing at the region of a resist roller 510. Thepaper S on which the overlapping color toner image is transferred is fedto a fixing apparatus 512 by a transfer belt 511, and then fed to apaper delivery tray 514 by means of delivering rollers 513.

After the toner images are transferred onto the transfer belt 501,residual toners on the photo conductor drums 504-1, 504-2, 504-3 and504-4 are removed by the respective cleaning apparatuses 508-1, 508-2,508-3 and 508-4, thereby preparing for the next image formation.

In the aforementioned manner, in an image forming apparatus (laserprinter) including: photo conductors (the photo conductor drums 504-1,504-2, 504-3 and 504-4) on which electrostatic images are formed bymeans of the optical scanning means having the optical scanningapparatus; developing means (the developing apparatuses 502-1, 502-2,502-3 and 502-4) developing the electrostatic images by toners; andtransfer means (the transcriber 515 and the driven roller R2) fortransferring the developed toner images onto a recording paper (thepaper S), by using the optical scanning apparatuses (vibration mirrormodules 130B) forming the optical scanning means (500-1, 500-2, 500-3and 500-4), it is possible to reduce degradation of image quality due todynamic deformation of the vibration mirrors. Particularly, it ispossible to improve image quality in color image forming apparatusesthat form color images.

The present invention is not limited to the specifically disclosedembodiments, and variations and modifications may be made withoutdeparting from the scope of the present invention.

The present application is based on Japanese priority applications No.2003-138964 filed on May 16, 2003 and No. 2003-172797 filed on Jun. 18,2003, the entire contents of which are hereby incorporated by reference.

1-24. (canceled) 25: An optical scanning apparatus, comprising: avibration mirror having a mirror surface that reflects an optical beamand vibrated in a vibration space formed in said optical scanningapparatus; a pair of torsion beams swingably supporting said vibrationmirror in the vibration space, wherein the vibration space is sealed andan air pressure therein is adjusted such that a characteristic of saidvibration mirror falls within a predetermined range; and a drivingvoltage generator applying a voltage of a predetermined frequency tosaid optical scanning apparatus, wherein the vibration mirror is drivenin a band that is in the vicinity of a resonance frequency and isoutside a resonance peak.
 26. (canceled) 27: An optical scanningapparatus, comprising: a vibration mirror having a mirror surface thatreflects an optical beam; a pair of torsion beams swingably supportingsaid vibration mirror in a sealed vibration space formed in said opticalscanning apparatus; and an air pressure adjusting part that adjusts anair pressure in the vibration space such that a characteristic of saidvibration mirror falls within a predetermined range, wherein the airpressure adjusting part absorbs a gas in the vibration space, andadjusts the air pressure in the vibration space by absorbing the gastherein. 28: The optical scanning apparatus as claimed in claim 27,wherein a plurality of the air pressure adjusting parts are arranged atdifferent positions. 29: An optical scanning apparatus, comprising: avibration mirror having a mirror surface that reflects an optical beam;a pair of torsion beams swingably supporting said vibration mirror in asealed vibration space formed in said optical scanning apparatus; and anair pressure adjusting part that adjusts an air pressure in thevibration space such that a characteristic of said vibration mirrorfalls within a predetermined range, wherein the air pressure adjustingpart releases a gas in the vibration space and adjusts the air pressurein the vibration space by releasing the gas therein. 30: The opticalscanning apparatus as claimed in claim 29, wherein a plurality of theair pressure adjusting parts are arranged at different positions. 31-40.(canceled) 41: An optical scanning apparatus, comprising: a vibrationmirror having a mirror surface that reflects an optical beam; a pair oftorsion beams swingably supporting said vibration mirror in a sealedvibration space formed in said optical scanning apparatus; an airpressure adjusting part that adjusts an air pressure in the vibrationspace such that a characteristic of said vibration mirror falls within apredetermined range; and a driving voltage generator applying a voltageof a predetermined frequency to said optical scanning apparatus, whereinthe vibration mirror is driven in a band that is in the vicinity of aresonance frequency and is outside a resonance peak. 42: An opticalscanning apparatus, comprising; a vibration mirror having a mirrorsurface that reflects an optical beam and vibrated in a sealed vibrationspace formed in said optical scanning apparatus; a pair of torsion beamsswingably supporting said vibration mirror in the sealed vibrationspace; and an air pressure adjusting part that adjusts an air pressurein the sealed vibration space such that a predetermined swing angle isobtained at a predetermined driving frequency or a predetermined band.43: The optical scanning apparatus as claimed in claim 42, wherein theair pressure adjusting part absorbs a gas in the vibration space, andadjusts the air pressure in the vibration space by absorbing the gastherein. 44: The optical scanning apparatus as claimed in claim 43,wherein a plurality of the air pressure adjusting parts are arranged atdifferent positions. 45: The optical scanning apparatus as claimed inclaim 42, wherein the air pressure adjusting part releases a gas in thevibration space and adjusts the air pressure in the vibration space byreleasing the gas therein. 46: The optical scanning apparatus as claimedin claim 45, wherein a plurality of the air pressure adjusting parts arearranged at different positions. 47: The optical scanning apparatus asclaimed in claim 42, wherein a gas introduced into the vibration spaceis formed by mixing a plurality of kinds of gases. 48: The opticalscanning apparatus as claimed in claim 47, wherein a plurality of theair pressure adjusting parts are arranged at different positions. 49:The optical scanning apparatus as claimed in claim 42, wherein the airpressure adjusting part includes a plurality of kinds of air pressureadjusting parts. 50: The optical scanning apparatus as claimed in claim49, wherein at least one of the air pressure adjusting parts absorbs agas and another of the air pressure adjusting parts releases a gas. 51:The optical scanning apparatus as claimed in claim 50, wherein the airpressure adjusting parts are arranged at different positions. 52: Theoptical scanning apparatus as claimed in claim 49, wherein the airpressure adjusting parts have different activation temperatures. 53: Theoptical scanning apparatus as claimed in claim 52, wherein the airpressure adjusting parts are arranged at different positions. 54: Theoptical scanning apparatus as claimed in claim 49, wherein the airpressure adjusting parts have different activation temperatures. 55: Theoptical scanning apparatus as claimed in claim 54, wherein the airpressure adjusting parts are arranged at different positions. 56: Theoptical scanning apparatus as claimed in claim 49, wherein the airpressure adjusting parts are arranged at different positions. 57: Theoptical scanning apparatus as claimed in claim 42, further comprising: adriving voltage generator applying a voltage of a predeterminedfrequency to said optical scanning apparatus, wherein the vibrationmirror is driven in a band that is in the vicinity of a resonancefrequency and is outside a resonance peak. 58: An image formingapparatus, comprising: an optical scanning apparatus; a photo conductoron which an electrostatic image is formed by said optical scanningapparatus; a developing part developing the electrostatic image by atoner; and a transfer part transferring a developed toner image onto asheet medium, said optical scanning apparatus including: a vibrationmirror having a mirror surface that reflects an optical beam andvibrated in a vibration space formed in said optical scanning apparatus;and a pair of torsion beams swingably supporting said vibration mirrorin the vibration space, wherein the vibration space is sealed and an airpressure therein is adjusted such that a characteristic of saidvibration mirror falls within a predetermined range. 59: An imageforming apparatus, comprising: an optical scanning apparatus; a photoconductor on which an electrostatic image is formed by said opticalscanning apparatus; a developing part developing the electrostatic imageby a toner; and a transfer part transferring a developed toner imageonto a sheet medium, said optical scanning apparatus including: avibration mirror having a mirror surface that reflects an optical beamand vibrated in a sealed vibration space formed in said optical scanningapparatus; a pair of torsion beams swingably supporting said vibrationmirror in the sealed vibration space; and an air pressure adjusting partthat adjusts an air pressure in the sealed vibration space such that acharacteristic of said vibration mirror falls within a predeterminedrange. 60: An image forming apparatus, comprising: an optical scanningapparatus; a photo conductor on which an electrostatic image is formedby said optical scanning apparatus; a developing part developing theelectrostatic image by a toner; and a transfer part transferring adeveloped toner image onto a sheet medium, said optical scanningapparatus including: a vibration mirror having a mirror surface thatreflects an optical beam and vibrated in a sealed vibration space formedin said optical scanning apparatus; a pair of torsion beams swingablysupporting said vibration mirror in the sealed vibration space; and anair pressure adjusting part that adjusts an air pressure in the sealedvibration space such that a predetermined swing angle is obtained at apredetermined driving frequency or a predetermined band.